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# Journal of Microelectromechanical Systems

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Displaying Results 1 - 25 of 30

Publication Year: 2008, Page(s):C1 - C4
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• ### Journal of Microelectromechanical Systems publication information

Publication Year: 2008, Page(s): C2
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• ### Light-Actuated AC Electroosmosis for Nanoparticle Manipulation

Publication Year: 2008, Page(s):525 - 531
Cited by:  Papers (52)
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We present a novel light-actuated ac electroosmosis (LACE) mechanism that allows the concentration and transportation of micro- and nanoscopic particles using light-patterned dynamically reconfigured microfluidic vortices on a photoconductive surface. LACE is realized by sandwiching an aqueous liquid medium between a featureless photoconductive surface and a transparent indium tin oxide electrode.... View full abstract»

• ### Design, Modeling, and Demonstration of a MEMS Repulsive-Force Out-of-Plane Electrostatic Micro Actuator

Publication Year: 2008, Page(s):532 - 547
Cited by:  Papers (35)
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An analytical model is developed for a two-layer repulsive-force out-of-plane micro electrostatic actuator by using conformal mapping techniques. The model provides the means to establish the performance characteristics in terms of stroke and generated force of the actuator and is used to develop design and optimization rules for the actuator. Numerical simulations were conducted in order to verif... View full abstract»

• ### An Integrated 2-D Active Optical Fiber Manipulator With Microfluidic Channel for Optical Trapping and Manipulation

Publication Year: 2008, Page(s):548 - 557
Cited by:  Papers (5)
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We report a new two-axis active optical fiber manipulator for on-chip optical manipulation and detection in microfluidic environment. The system comprising of air chambers, fiber channels, controllable moving walls, and membrane structures were fabricated by using microelectromechanical systems technology. By adjusting air pressures to control the deflection of the pneumatic chambers placed orthog... View full abstract»

• ### Efficient Tools for the Calculation of Drag Forces on Planar Microelectromechanical Systems

Publication Year: 2008, Page(s):558 - 572
Cited by:  Papers (1)
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In air-packaged surface micromachined devices, drag forces introduce coupling between moving mechanical parts and are an important energy loss mechanism, thus playing an important role in device performance. In these devices, the amount of drag is greatly influenced by the presence of the nearby substrate. In this paper, we present a precorrected fast Fourier transform (pFFT) accelerated boundary ... View full abstract»

• ### Droplet Formation Utilizing Controllable Moving-Wall Structures for Double-Emulsion Applications

Publication Year: 2008, Page(s):573 - 581
Cited by:  Papers (20)  |  Patents (19)
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The formation of microscale single- and double-emulsion droplets with various sizes is crucial for a variety of industrial applications. In this paper, we report a new microfluidic device which can actively fine-tune the size of single- and double-emulsion droplets in liquids by utilizing controllable moving-wall structures. Moreover, various sizes of external and internal droplets for double emul... View full abstract»

• ### A Particle Flow Velocity Profiler Using In-Channel Electrodes With Unevenly Divided Interelectrode Gaps

Publication Year: 2008, Page(s):582 - 589
Cited by:  Papers (1)
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This paper presents a particle flow velocity profiler that employs in-channel electrodes with unevenly divided interelectrode gaps. The proposed electrical method measures both the particle position and velocity from the voltage signals generated by particles passing across three sensing electrodes, thus obtaining the flow velocity profile of the particles in a microfluidic channel. In this paper,... View full abstract»

• ### Neisseria Meningitidis Detection Based on a Microcalorimetric Biosensor With a Split-Flow Microchannel

Publication Year: 2008, Page(s):590 - 598
Cited by:  Papers (9)  |  Patents (3)
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This paper proposes and demonstrates a novel microcalorimetric sensor for detecting Neisseria meningitidis. To eliminate additional heating structures and calibration steps, a split-flow microchannel is integrated into the microcalorimeter. The split-flow microchannel constantly maintains the output of the microcalorimeter near a zero level without the use of any heating elements when there is no ... View full abstract»

• ### A Capacitive Micromachined Ultrasonic Transducer Array for Minimally Invasive Medical Diagnosis

Publication Year: 2008, Page(s):599 - 610
Cited by:  Papers (14)
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A capacitive micromachined ultrasonic transducer (CMUT) array for minimally invasive medical diagnosis has been developed. Unlike traditional ultrasonic transducers, which generally use a bulky piece of substrate, this transducer array was integrated on a 40--thick micromachined silicon substrate into a probe shape with a typical shank width of 50-80 and a shank length of 4-8 mm. For 1-D arrays, 2... View full abstract»

• ### Adhesion-Based Cell Sorter With Antibody-Coated Amino-Functionalized-Parylene Surface

Publication Year: 2008, Page(s):611 - 622
Cited by:  Papers (21)
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An adhesion-based cell-separation device is developed for the extraction of rare cells from a cell mixture. The cell-separation principle mimics leukocyte recruitment from blood vessels in our body, where leukocytes are decelerated by antigen-antibody interaction at the sites of inflammation or injury. Separation of cell mixture can be accomplished by simply introducing the sample plug through an ... View full abstract»

• ### Silicon Nanotweezers With Subnanometer Resolution for the Micromanipulation of Biomolecules

Publication Year: 2008, Page(s):623 - 631
Cited by:  Papers (53)
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We describe electrostatically actuated silicon nanotweezers which are intended for the manipulation and characterization of filamentary molecules. The microelectromechanical system consists of a pair of opposing tips whose distance can be accurately adjusted by means of an integrated differential capacitive sensor. The fabrication process is based on silicon-on-insulator technology and combines KO... View full abstract»

• ### Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings

Publication Year: 2008, Page(s):632 - 642
Cited by:  Papers (43)
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We report the design, fabrication, and characterization of a rotary micromotor supported on microball bearings. This is the first demonstration of a rotary micromachine with a robust mechanical support provided by microball-bearing technology. A six-phase bottom-drive variable-capacitance micromotor (Phi = 14 mm) is designed and simulated using the finite-element (FE) method. The stator and the ro... View full abstract»

• ### Determination of the Pull-Off Forces and Pull-Off Dynamics of an Electrostatically Actuated Silicon Disk

Publication Year: 2008, Page(s):643 - 652
Cited by:  Papers (7)
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To increase the mechanical sensitivity of micromachined yaw rate sensors, the proof mass can be designed as an electrostatically levitated flywheel. Therefore, the flywheel is kept in its levitated position by an electrostatic field exerted by an array of electrodes above and underneath the flywheel. Once the flywheel is in contact with either the bottom electrodes or the top electrodes, adhesion ... View full abstract»

• ### Effect of Heat Transfer on Materials Selection for Bimaterial Electrothermal Actuators

Publication Year: 2008, Page(s):653 - 667
Cited by:  Papers (11)  |  Patents (1)
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Bimaterial electrothermal actuation is a commonly employed actuation method in microsystems. This paper focuses on optimal materials selection for bimaterial structures to maximize the thermomechanical response based on electrothermal heat-transfer analysis. Competition between different modes of heat transfer in electrothermally actuated cantilever bimaterial is analyzed for structures at the mic... View full abstract»

• ### Minimum Energy Actuation and Bounce-Back Behavior of Microbeams Using $delta$ Voltage Pulses

Publication Year: 2008, Page(s):668 - 677
Cited by:  Papers (3)
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Minimizing impact force during actuation reduces damage to contacting surfaces. An electrostatic actuation method for creating a soft contact between dielectric and semiconductor surfaces is described and applied to cantilevers and clamped beams. The method utilizes a short high-voltage delta-pulse followed by a low dc hold voltage to pull in the cantilever or beams. Removal of the hold voltage re... View full abstract»

• ### Passive Reduced-Order Macromodeling Algorithm for Microelectromechanical Systems

Publication Year: 2008, Page(s):678 - 687
Cited by:  Papers (8)
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In this paper, we present a passive reduced-order macromodeling algorithm for second-order dynamic systems of linear microelectromechanical systems (MEMS) devices. The proposed reduction algorithm is based on congruent transformations. The system equations of MEMS devices, given by finite-element methods (FEMs), are converted to state-space forms that are compatible with passive Krylov subspace me... View full abstract»

• ### Simulation of Thin-Film Damping and Thermal Mechanical Noise Spectra for Advanced Micromachined Microphone Structures

Publication Year: 2008, Page(s):688 - 697
Cited by:  Papers (5)  |  Patents (3)
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In many micromachined sensors the thin (2-10 thick) air film between a compliant diaphragm and backplate electrode plays a dominant role in shaping both the dynamic and thermal noise characteristics of the device. Silicon microphone structures used in grating-based optical-interference microphones have recently been introduced that employ backplates with minimal area to achieve low damping and low... View full abstract»

• ### Harmonic Balance Nonlinear Identification of a Capacitive Dual-Backplate MEMS Microphone

Publication Year: 2008, Page(s):698 - 708
Cited by:  Papers (5)  |  Patents (3)
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This paper describes the application of a nonlinear identification method to extract model parameters from the steady-state response of a capacitive dual-backplate microelectromechanical systems microphone. The microphone is modeled as a single-degree-of-freedom second-order system with both electrostatic and mechanical nonlinearities. A harmonic balance approach is applied to the nonlinear govern... View full abstract»

• ### A Compact Squeeze-Film Model Including Inertia, Compressibility, and Rarefaction Effects for Perforated 3-D MEMS Structures

Publication Year: 2008, Page(s):709 - 723
Cited by:  Papers (34)
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We present a comprehensive analytical model of squeeze-film damping in perforated 3D microelectromechanical system structures. The model includes effects of compressibility, inertia, and rarefaction in the flow between two parallel plates forming the squeeze region, as well as the flow through perforations. The two flows are coupled through a nontrivial frequency-dependent pressure boundary condit... View full abstract»

• ### Two-Dimensional Fiber Positioning and Clamping Device for Product-Internal Microassembly

Publication Year: 2008, Page(s):724 - 734
Cited by:  Papers (7)  |  Patents (3)
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In this paper, we present a microelectromechanical systems-based two-degrees-of-freedom positioning device combined with a clamping structure for positioning and constraining an optical fiber. The fiber position can be controlled in the two directions perpendicular to the fiber axis using two specifically designed wedges that can be accurately moved in-plane. These wedges are positioned using in-p... View full abstract»

• ### Nanoscale Pattern Definition on Nonplanar Surfaces Using Ion Beam Proximity Lithography and Conformal Plasma-Deposited Resist

Publication Year: 2008, Page(s):735 - 740
Cited by:  Papers (7)  |  Patents (2)
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Ion beam proximity lithography (IBL) is a technique where a broad beam of energetic light ions floods a stencil mask and transmitted beamlets transfer the mask pattern to resist on a substrate. With a depth-of-field up to 20000 times larger than the minimum feature size and the high-throughput potential of a parallel exposure tool, IBL is very attractive for prototyping and manufacturing nanoelect... View full abstract»

• ### Nanoparticle Liquids for Surface Modification and Lubrication of MEMS Switch Contacts

Publication Year: 2008, Page(s):741 - 746
Cited by:  Papers (18)
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Contact failures in microelectromechanical system (MEMS) switches, particularly during hot switching, prevent their widespread use. In this paper, a nanoparticle liquid (NPL) lubricant is synthesized and deposited on MEMS switch contacts as a nanotechnology-based lubricant. NPLs are monolithic hybrid materials comprised of an inorganic nanosized metallic core and an organic low viscosity corona. T... View full abstract»

• ### A Self-Aligned Fabrication Process for Capacitive Fixed-Fixed Beam RF MEMS Components

Publication Year: 2008, Page(s):747 - 754
Cited by:  Papers (1)
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A self-aligned fabrication process for capacitive fixed-fixed beam RF microelectromechanical system (MEMS) components is disclosed. It enables the scaling of the critical dimensions and reduces the number of processing steps by 40% compared with a conventional RF MEMS fabrication process. RF MEMS varactors with beam lengths of 30 are demonstrated by using the self-aligned fabrication process, and ... View full abstract»

• ### Temperature Dependence of Quality Factor in MEMS Resonators

Publication Year: 2008, Page(s):755 - 766
Cited by:  Papers (85)  |  Patents (9)
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The temperature dependence of the quality factor of microelectromechanical system (MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are several energy loss mechanisms that determine the quality factor. These include air-damping, thermoelastic dissipation, and anchor and surface losses. For resonators operating at a low pressure in hermetic wafer-scale encapsulation, th... View full abstract»

## Aims & Scope

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

Full Aims & Scope

## Meet Our Editors

Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems