Issue 5 • Date Oct. 2005
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Displaying Results 1 - 25 of 42
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Table of contents
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PDF (42 KB)
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Journal of Microelectromechanical Systems publication information
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PDF (38 KB)
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Polymer-core conductor approaches for RF MEMS
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PDF (3376 KB)
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Polymer-based wide-bandwidth and high-sensitivity micromachined electron tunneling accelerometers using hot embossing
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PDF (1392 KB)
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Anodic oxidation during MEMS processing of silicon and polysilicon: native oxides can be thicker than you think
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PDF (2656 KB)
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MEMS lubricants based on bound and mobile phases of hydrocarbon compounds: film deposition and performance evaluation
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PDF (992 KB)
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Method for determining a dynamical state-space model for control of thermal MEMS devices
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PDF (976 KB)
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Evaluation of plasma deposited silicon nitride thin films for microsystems technology
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PDF (528 KB)
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Size scale effects on cavitating flows through microorifices entrenched in rectangular microchannels
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PDF (1296 KB)
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Incompressible and compressible flows through rectangular microorifices entrenched in silicon microchannels
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PDF (672 KB)
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A four-bit digital microinjector using microheater array for adjusting the ejected droplet volume
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PDF (1200 KB)
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Electrostatic microresonators from doped hydrogenated amorphous and nanocrystalline silicon thin films
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PDF (720 KB)
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Aims & Scope
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Meet Our Editors
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems


