Issue 2 • Date April 2005
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Displaying Results 1 - 25 of 31
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Table of contents
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PDF (35 KB)
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Journal of Microelectromechanical Systems publication information
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PDF (37 KB)
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Microfluidic electrodischarge devices with integrated dispersion optics for spectral analysis of water impurities
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PDF (1120 KB)
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Electrostatic correction of structural imperfections present in a microring gyroscope
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PDF (3760 KB)
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A MEMS conical spring actuator array
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PDF (2456 KB)
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Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch
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PDF (1464 KB)
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Optical and mechanical performance of a novel magnetically actuated MEMS-based optical switch
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PDF (1688 KB)
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Computational study of the effect of finger width and aspect ratios for the electrostatic levitating force of MEMS combdrive
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PDF (1080 KB)
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Sidewall morphology of electroformed LIGA parts-implications for friction, adhesion, and wear control
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PDF (1120 KB)
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Low-temperature wafer bonding: a study of void formation and influence on bonding strength
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PDF (5312 KB)
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Partial release and detachment of microfabricated metal and polymer structures by anodic metal dissolution
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PDF (712 KB)
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Aims & Scope
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Meet Our Editors
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems


