Semiconductor Manufacturing, IEEE Transactions on
Issue 4 • Date Nov. 2004
Society Sponsor
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Displaying Results 1 - 25 of 28
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Table of contents
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PDF (56 KB)
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IEEE Transactions on Semiconductor Manufacturing publication information
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PDF (40 KB)
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Guest Editorial Special Section on Microelectronics Manufacturing: Prosperity and Environmental Stewardship
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PDF (1952 KB)
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Reduction of PFC emissions to the environment through advances in CVD and etch processes
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PDF (856 KB)
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Process optimization and PFC emission reduction using a c-C4F8 chamber cleaning process on a novellus concept 1 dielectric PECVD tool
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PDF (880 KB)
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Reduced PFC emissions and gas consumption using a c-C4F8-based PECVD chamber clean chemistry
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PDF (600 KB)
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"Dry" lithography using liquid and supercritical carbon dioxide based chemistries and processes
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PDF (1656 KB)
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Acoustically actuated flextensional SixNy and single-crystal silicon 2-D micromachined ejector arrays
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PDF (1128 KB)
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Material removal and particulate generation during abrasion of copper films using a fixed abrasive pad
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PDF (712 KB)
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Biotreatment of copper and isopropyl alcohol in waste from semiconductor manufacturing
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PDF (264 KB)
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Condensation of silanol groups in porous methylsilsesquioxane films using Supercritical CO2 and alcohol cosolvents
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PDF (488 KB)
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Quantifying the environmental footprint of semiconductor equipment using the environmental value systems analysis (EnV-S)
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PDF (880 KB)
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Guest Editorial Special Section on the Advanced Semiconductor Manufacturing Conference
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PDF (232 KB)
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Line-profile and critical-dimension monitoring using a normal incidence optical CD metrology
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PDF (1816 KB)
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Yield learning and the sources of profitability in semiconductor manufacturing and process development
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PDF (456 KB)
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Automated analysis structures for BiCMOS process simulation, development, and verification
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PDF (1968 KB)
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METRO-3D: an efficient three-dimensional wafer inspection simulator for next-generation lithography
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PDF (1312 KB)
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In-line defect reduction from a historical perspective and its implications for future integrated circuit manufacturing
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PDF (1184 KB)
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Call for papers on journal of display technology
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PDF (516 KB)
Aims & Scope
IEEE Transactions on Semiconductor Manufacturing addresses innovations of interest to the integrated circuit manufacturing researcher and professional.
Meet Our Editors
Editor-in-Chief
Dr. Sean P. Cunningham
Intel Corporation
RN4-80
2200 Mission College Boulevard
Santa Clara, CA 95054 95054 USA
sean.p.cunningham@intel.com
Phone:+1 408-653-5955
