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Journal of Microelectromechanical Systems

Issue 1 • Date Feb. 2004

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Displaying Results 1 - 21 of 21
  • Table of contents

    Publication Year: 2004, Page(s):c1 - c4
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  • IEEE Journal of Microelectromechanical Systems publication information

    Publication Year: 2004, Page(s): c2
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  • Application of nanoparticles dispersed polymer to micropowder blasting mask

    Publication Year: 2004, Page(s):1 - 6
    Cited by:  Papers (7)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (456 KB) | HTML iconHTML

    Improvements in micropowder blasting have been realized for rapid prototyping of channels in glass substrates. The technique presented in this study consists of laser patterning of Au nanoparticles dispersed polymer and micropowder blasting. The patterned polymer was utilized as a mask material for the subsequent mechanical removal of the glass by the micropowder blasting. Five different polymers ... View full abstract»

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  • A microreactor for hydrogen production in micro fuel cell applications

    Publication Year: 2004, Page(s):7 - 18
    Cited by:  Papers (147)  |  Patents (6)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (1096 KB) | HTML iconHTML

    A silicon-chip based microreactor has been successfully fabricated and tested for carrying out the reaction of methanol reforming for microscale hydrogen production. The developed microreactor in combination with a micro fuel cell is proposed as an alternative to conventional portable sources of electricity such as batteries due to its ability to provide an uninterrupted supply of electricity as l... View full abstract»

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  • Multilevel beam SOI-MEMS fabrication and applications

    Publication Year: 2004, Page(s):19 - 30
    Cited by:  Papers (39)  |  Patents (18)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (1008 KB) | HTML iconHTML

    A microfabrication technology has been developed and demonstrated, which enhances the capabilities and applications of high aspect ratio silicon-on-insulator microelectromechanical systems (SOI-MEMS) by enabling additional independent degrees of freedom of operation: both upward and downward vertical pistoning motion as well as bi-directional rotation. This is accomplished by applying multiple-mas... View full abstract»

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  • Fluidic packaging of microengine and microrocket devices for high-pressure and high-temperature operation

    Publication Year: 2004, Page(s):31 - 40
    Cited by:  Papers (19)  |  Patents (1)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (736 KB) | HTML iconHTML

    The fluidic packaging of Power MEMS devices such as the MIT microengine and microrocket requires the fabrication of hermetic seals capable of withstanding temperature in the range 20-600°C and pressures in the range 100-300 atm. We describe an approach to such packaging by attaching Kovar metal tubes to a silicon device using glass seal technology. Failure due to fracture of the seals is a sig... View full abstract»

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  • Two microcantilever designs: lumped-parameter model for static and modal analysis

    Publication Year: 2004, Page(s):41 - 50
    Cited by:  Papers (18)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (1672 KB) | HTML iconHTML

    This paper develops a lumped-parameter analytical model to enable static load-deformation and modal analysis for two microcantilever designs that can be utilized in mass detection and AFM applications. The circularly filleted microcantilever is currently utilized in several applications, whereas the elliptically filleted configuration is novel. Closed-form compliance/stiffness equations are derive... View full abstract»

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  • Electrostatic actuators with expanded tuning range due to biaxial intrinsic stress gradients

    Publication Year: 2004, Page(s):51 - 62
    Cited by:  Papers (8)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (576 KB) | HTML iconHTML

    A stress gradient was induced in two directions (through the plane of the beam and along its length) to produce a beam deflection of varying curvature. The stress gradient in the through-plane direction was produced by altering the conditions during electroplating and in the in-plane direction through lithographic patterning. The pull-down characteristics of four electrostatic actuator designs wer... View full abstract»

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  • High-performance surface-micromachined inchworm actuator

    Publication Year: 2004, Page(s):63 - 74
    Cited by:  Papers (90)  |  Patents (1)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (896 KB) | HTML iconHTML

    This work demonstrates a polycrystalline silicon surface-micromachined inchworm actuator that exhibits high-performance characteristics such as large force (±0.5 millinewtons), large velocity range (0 to ±4.4 mm/sec), large displacement range (±100 microns), small step size (±10, ±40 or ±100 nanometers), low power consumption (nanojoules per cycle), contin... View full abstract»

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  • A water-powered micro drug delivery system

    Publication Year: 2004, Page(s):75 - 82
    Cited by:  Papers (63)  |  Patents (26)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (656 KB) | HTML iconHTML

    A plastic micro drug delivery system has been successfully demonstrated by utilizing the principle of osmosis without any electrical power consumption. The system has an osmotic microactuator (see Su, Lin, and Pisano, J. Microelectromech., vol. 11, pp. 736-7462, Dec. 2002) and a polydimethylsiloxane (PDMS) microfluidic cover compartment consisting of a reservoir, a microfluidic channel and a deliv... View full abstract»

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  • Integrated self-assembling and holding technique applied to a 3-D MEMS variable optical attenuator

    Publication Year: 2004, Page(s):83 - 90
    Cited by:  Papers (20)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (1688 KB) | HTML iconHTML

    The application of polysilicon/gold bimorph stress-induced curved beams for three-dimensional self-assembly of MEMS devices is reported. The mechanical principle behind this self-assembling procedure is presented and comparison with current assembling methods are made. With this self-assembling technique, no postprocessing is required. A free-space optical MEMS device in the form of a variable opt... View full abstract»

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  • Development of a MEMS-based control system for compressible flow separation

    Publication Year: 2004, Page(s):91 - 99
    Cited by:  Papers (5)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (480 KB) | HTML iconHTML

    A MEMS-based sensor and actuator system has been designed and fabricated for separation control in the compressible flow regime. The MEMS sensors in the system are surface-micromachined shear stress sensors and the actuators are bulk-micromachined balloon vortex generators (VGs). A three-dimensional (3-D) wing model embedded with the shear stress sensors and balloon VGs was tested in a transonic w... View full abstract»

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  • Micromechanical mixer-filters ("mixlers")

    Publication Year: 2004, Page(s):100 - 112
    Cited by:  Papers (103)  |  Patents (6)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (968 KB) | HTML iconHTML

    A device comprised of interlinked micromechanical resonators with capacitive mixer transducers has been demonstrated to perform both frequency translation (i.e., mixing) and highly selective low-loss filtering of applied electrical input signals. In particular, successful downconversion of a 200-MHz radio frequency (RF) signal down to a 37-MHz intermediate frequency (IF) and subsequent high-Q band... View full abstract»

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  • Development of a deep silicon phase Fresnel lens using Gray-scale lithography and deep reactive ion etching

    Publication Year: 2004, Page(s):113 - 120
    Cited by:  Papers (59)  |  Patents (5)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (560 KB) | HTML iconHTML

    We report the first fabrication and development of a deep phase Fresnel lens (PFL) in silicon through the use of gray-scale lithography and deep-reactive ion etching (DRIE). A Gaussian tail approximation is introduced as a method of predicting the height of photoresist gray levels given the relative amount of transmitted light through a gray-scale optical mask. Device mask design is accomplished t... View full abstract»

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  • Experimental verification of a design methodology for torsion actuators based on a rapid pull-in solver

    Publication Year: 2004, Page(s):121 - 130
    Cited by:  Papers (20)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (640 KB) | HTML iconHTML

    In this work, an experimental and theoretical study of the effect of various geometrical parameters on the electromechanical response and pull-in parameters of torsion actuators is presented. A lumped two-degrees-of-freedom (L2DOF) pull-in model that takes into account the bending/torsion coupling, previously proposed for cantilever suspended actuators, is tailored for the torsion actuators under ... View full abstract»

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  • Solid-State Sensor, Actuator, and Microsystems Workshop (HH2004)

    Publication Year: 2004, Page(s): 131
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  • Micro and Nanotechnology Commercialization Education Foundation (MANCEF)

    Publication Year: 2004, Page(s): 132
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  • International Semiconductor Conference

    Publication Year: 2004, Page(s): 133
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  • Join IEEE

    Publication Year: 2004, Page(s): 134
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  • IEEE copyright form

    Publication Year: 2004, Page(s):135 - 136
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  • IEEE Journal of Microelectromechanical Systems Information for authors

    Publication Year: 2004, Page(s): c3
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Aims & Scope

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

Full Aims & Scope

Meet Our Editors

Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems