Semiconductor Manufacturing, IEEE Transactions on
Issue 4 • Date Nov. 2002
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Displaying Results 1 - 25 of 30
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2001 Best Paper Award
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PDF (214 KB)
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Changes in the Editorial Board
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PDF (178 KB)
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Guest editorial special section on the advanced semiconductor manufacturing conference
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PDF (183 KB)
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Guest editorial special section on the international symposium on semiconductor manufacturing
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PDF (175 KB)
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Author index
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PDF (195 KB)
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Subject index
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PDF (221 KB)
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Real-time furnace modeling and diagnostics
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PDF (587 KB)
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Development of data logging system for chemical mechanical polishing and its application for process control
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PDF (424 KB)
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Study of FSG/SiO2 double interlayer conditions to prevent Al wiring delamination for sub-0.18-μm device integration
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PDF (867 KB)
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Plasma charging defect characterization, inspection, and monitors in poly-buffered STI
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PDF (1354 KB)
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Comparing the economic impact of alternative metrology methods in semiconductor manufacturing
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PDF (431 KB)
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Treatment of organic wastewater discharged from semiconductor manufacturing process by ultraviolet/hydrogen peroxide and biodegradation
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PDF (719 KB)
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Development of a two-step electroplating process with a long-term stability for applying to Cu metallization of 0.1-μm generation logic ULSIs
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PDF (839 KB)
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Improving the yield of deep submicron CMOS processes by controlling the grain size of poly-Si gate through post deposition rapid thermal anneal
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PDF (222 KB)
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Highly sensitive inspection system for lithography-related faults in agile-fab - detecting algorithm for monitoring and evaluation of yield impact
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PDF (635 KB)
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Phi-scatterometry for integrated linewidth and process control in DRAM manufacturing
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PDF (1222 KB)
Aims & Scope
IEEE Transactions on Semiconductor Manufacturing addresses innovations of interest to the integrated circuit manufacturing researcher and professional.
Meet Our Editors
Editor-in-Chief
Dr. Sean P. Cunningham
Intel Corporation
RN4-80
2200 Mission College Boulevard
Santa Clara, CA 95054 95054 USA
sean.p.cunningham@intel.com
Phone:+1 408-653-5955
