Issue 4 • Date Nov 1990
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An hypothesis test technique for determining a difference in sampled parts defective utilizing Fisher's exact test IC production
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PDF (140 KB)
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An organization and interface for sensor-driven semiconductor process control systems
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PDF (888 KB)
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AC product defect level and yield loss
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PDF (700 KB)
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A global model for rapid thermal processors
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PDF (524 KB)
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Effect of radiation shield angle on temperature and stress profiles during rapid thermal annealing
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PDF (544 KB)
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A redundant metal-polyimide thin film interconnection process for wafer scale dimensions
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PDF (1144 KB)
Aims & Scope
IEEE Transactions on Semiconductor Manufacturing addresses innovations of interest to the integrated circuit manufacturing researcher and professional.
Meet Our Editors
Editor-in-Chief
Dr. Sean P. Cunningham
Intel Corporation
RN4-80
2200 Mission College Boulevard
Santa Clara, CA 95054 95054 USA
sean.p.cunningham@intel.com
Phone:+1 408-653-5955


