Issue 3 • Date Aug 1990
Filter Results
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Applications of magnetic levitation-based micro-automation in semiconductor manufacturing
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PDF (732 KB)
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Surface active buffered hydrogen fluoride having excellent wettability for ULSI processing
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PDF (1292 KB)
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A discussion of yield modeling with defect clustering, circuit repair, and circuit redundancy
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PDF (908 KB)
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Development of a magnetron-enhanced plasma process for tungsten etchback with response-surface methodology
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PDF (252 KB)
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Aims & Scope
IEEE Transactions on Semiconductor Manufacturing addresses innovations of interest to the integrated circuit manufacturing researcher and professional.
Meet Our Editors
Editor-in-Chief
Dr. Sean P. Cunningham
Intel Corporation
RN4-80
2200 Mission College Boulevard
Santa Clara, CA 95054 95054 USA
sean.p.cunningham@intel.com
Phone:+1 408-653-5955


