Microelectromechanical Systems, Journal of
Issue 2 • Date Jun 1998
Society Sponsor
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Displaying Results 1 - 17 of 17
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A low-temperature IC-compatible process for fabricating surface-micromachined metallic microchannels
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PDF (148 KB)
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A novel integrated silicon capacitive microphone-floating electrode “electret” microphone (FEEM)
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PDF (352 KB)
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Parametric modeling of a microaccelerometer: comparing I- and D-optimal design of experiments for finite-element analysis
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PDF (304 KB)
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Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control
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PDF (296 KB)
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A high-sensitivity z-axis capacitive silicon microaccelerometer with a torsional suspension
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PDF (316 KB)
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Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substrates
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PDF (152 KB)
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Electrothermal frequency tuning of folded and coupled vibrating micromechanical resonators
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PDF (392 KB)
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Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
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PDF (432 KB)
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Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution
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PDF (328 KB)
Aims & Scope
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Meet Our Editors
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems
