Issue 4 • Date Dec. 1997
Filter Results
Displaying Results 1 - 11 of 11
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1997 Index IEEE/ASME Journal Of Microelectromechanical Systems Vol. 6
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PDF (234 KB)
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Preliminary results on a silicon gyrometer based on acoustic mode coupling in small cavities
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PDF (300 KB)
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Feasibility of micro power supplies for MEMS
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PDF (156 KB)
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Fabrication of high-aspect-ratio microstructures on planar and nonplanar surfaces using a modified LIGA process
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PDF (232 KB)
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Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy
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PDF (80 KB)
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Magnetic and mechanical properties of micromachined strontium ferrite/polyimide composites
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PDF (136 KB)
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Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids
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PDF (384 KB)
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Aims & Scope
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Meet Our Editors
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems


