Microelectromechanical Systems, Journal of
Issue 2 • Date June 1997
Society Sponsor
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Displaying Results 1 - 11 of 11
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Correction To "Scratch Drive Actuator With Mechanical Links For Self-assembly Of Three-dimensional MEMS"
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PDF (6 KB)
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Uses of electroplated aluminum for the development of microstructures and micromachining processes
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PDF (300 KB)
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Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio
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PDF (420 KB)
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Accuracy assessment of 2-D and 3-D finite-element models of a double-stator electrostatic wobble motor
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PDF (312 KB)
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Ultrasound barrier microsystem for object detection based on micromachined transducer elements
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PDF (340 KB)
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M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
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PDF (364 KB)
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Gaseous slip flow in long microchannels
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PDF (328 KB)
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Aims & Scope
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Meet Our Editors
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems
