Issue 4 • Date Dec. 1996
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Displaying Results 1 - 10 of 10
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1996 Index IEEE/ASME Journal of Microelectromechanical Systems Vol. 5
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PDF (680 KB)
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Etch rates for micromachining processing
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PDF (1532 KB)
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Thin film shape memory alloy microactuators
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PDF (2308 KB)
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Measurement of residual stresses in a plate using a vibrational technique-application to electrolytic nickel coatings
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PDF (600 KB)
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A wafer-bonded floating-element shear stress microsensor with optical position sensing by photodiodes
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PDF (1060 KB)
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Aims & Scope
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Meet Our Editors
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems


