Direct Fabrication of Nanoscale Light Emitting Diode on Silicon Probe Tip for Scanning Microscopy
Hoshino, K.; Rozanski, L.J.; Vanden Bout, D.A.; Xiaojing Zhang
Page(s): 4-10
Digital Object Identifier 10.1109/JMEMS.2007.910254 Abstract
| Full Text: PDF (1539 KB)
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Deformable Polymer Adaptive Optical Mirrors
Friese, C.; Zappe, H.
Page(s): 11-19
Digital Object Identifier 10.1109/JMEMS.2007.913075 Abstract
| Full Text: PDF (1115 KB)
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A Low-Cost 128 × 128 Uncooled Infrared Detector Array in CMOS Process
Eminoglu, S.; Tanrikulu, M.Y.; Akin, T.
Page(s): 20-30
Digital Object Identifier 10.1109/JMEMS.2007.910235 Abstract
| Full Text: PDF (2397 KB)
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Analysis and Design of a Micromachined Electric-Field Sensor
Bahreyni, B.; Wijeweera, G.; Shafai, C.; Rajapakse, A.
Page(s): 31-36
Digital Object Identifier 10.1109/JMEMS.2007.911870 Abstract
| Full Text: PDF (551 KB)
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Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation
Hall, N.A.; Okandan, M.; Littrell, R.; Serkland, D.K.; Keeler, G.A.; Peterson, K.; Bicen, B.; Garcia, C.T.; Degertekin, F.L.
Page(s): 37-44
Digital Object Identifier 10.1109/JMEMS.2007.910243 Abstract
| Full Text: PDF (977 KB)
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Single- and Triaxis Piezoelectric-Bimorph Accelerometers
Qiang Zou; Wei Tan; Eun Sok Kim; Loeb, G.E.
Page(s): 45-57
Digital Object Identifier 10.1109/JMEMS.2007.909100 Abstract
| Full Text: PDF (2749 KB)
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A Novel Bistable Two-Way Actuated Out-of-Plane Electrothermal Microbridge
Michael, A.; Chee Yee Kwok; Yu, K.; Mackenzie, M.R.
Page(s): 58-69
Digital Object Identifier 10.1109/JMEMS.2007.911369 Abstract
| Full Text: PDF (3218 KB)
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Design and Characterization of Single-Layer Step-Bridge Structure for Out-of-Plane Thermal Actuator
Wen-Chih Chen; Po-I Yeh; Chih-Fan Hu; Weileun Fang
Page(s): 70-77
Digital Object Identifier 10.1109/JMEMS.2007.906761 Abstract
| Full Text: PDF (1066 KB)
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MEMS Switched Tunable Inductors
Rais-Zadeh, M.; Kohl, P.A.; Ayazi, F.
Page(s): 78-84
Digital Object Identifier 10.1109/JMEMS.2007.910257 Abstract
| Full Text: PDF (1906 KB)
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Vertically-Shaped Tunable MEMS Resonators
Morgan, B.; Ghodssi, R.
Page(s): 85-92
Digital Object Identifier 10.1109/JMEMS.2007.910251 Abstract
| Full Text: PDF (748 KB)
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An Improved Performance Poly-Si Pirani Vacuum Gauge Using Heat-Distributing Structural Supports
Mitchell, J.; Lahiji, G.R.; Najafi, K.
Page(s): 93-102
Digital Object Identifier 10.1109/JMEMS.2007.912711 Abstract
| Full Text: PDF (615 KB)
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CMOS–MEMS Lateral Electrothermal Actuators
Gilgunn, P.J.; Jingwei Liu; Sarkar, N.; Fedder, G.K.
Page(s): 103-114
Digital Object Identifier 10.1109/JMEMS.2007.911373 Abstract
| Full Text: PDF (884 KB)
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Design, Fabrication, and Testing of a Microfabricated Corona Ionizer
Beelee Chua; Wexler, A.S.; Tien, N.C.; Niemeier, D.A.; Holmen, B.A.
Page(s): 115-123
Digital Object Identifier 10.1109/JMEMS.2007.909515 Abstract
| Full Text: PDF (840 KB)
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Xiaosong Wu; Guang Yuan; Yong-Kyu Yoon; Allen, M.G.
Page(s): 124-132
Digital Object Identifier 10.1109/JMEMS.2007.911868 Abstract
| Full Text: PDF (1083 KB)
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Droplet Manipulation With Light on Optoelectrowetting Device
Pei-Yu Chiou; Zehao Chang; Wu, M.C.
Page(s): 133-138
Digital Object Identifier 10.1109/JMEMS.2007.904336 Abstract
| Full Text: PDF (592 KB)
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A Flow Rate Independent Cell Concentration Measurement Chip Using Electrical Cell Counters Across a Fixed Control Volume
Dong Woo Lee; Soyeon Yi; Young-Ho Cho
Page(s): 139-146
Digital Object Identifier 10.1109/JMEMS.2007.906766 Abstract
| Full Text: PDF (783 KB)
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Droplet-Based Microreactions With Oil Encapsulation
Chuang-Yuan Lee; Hongyu Yu; Wei Pang; Eun Sok Kim
Page(s): 147-156
Digital Object Identifier 10.1109/JMEMS.2007.911873 Abstract
| Full Text: PDF (1110 KB)
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Selective Transfer Technology for Microdevice Distribution
Guerre, R.; Drechsler, U.; Jubin, D.; Despont, M.
Page(s): 157-165
Digital Object Identifier 10.1109/JMEMS.2007.911370 Abstract
| Full Text: PDF (3430 KB)
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Displacement and Thermal Performance of Laser-Heated Asymmetric MEMS Actuators
Serrano, J.R.; Phinney, L.M.
Page(s): 166-174
Digital Object Identifier 10.1109/JMEMS.2007.911945 Abstract
| Full Text: PDF (730 KB)
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Thermal Isolation of Encapsulated MEMS Resonators
Jha, C.M.; Hopcroft, M.A.; Chandorkar, S.A.; Salvia, J.C.; Agarwal, M.; Candler, R.N.; Melamud, R.; Bongsang Kim; Kenny, T.W.
Page(s): 175-184
Digital Object Identifier 10.1109/JMEMS.2007.904332 Abstract
| Full Text: PDF (2417 KB)
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Theoretical and Experimental Study of Annular-Plate Self-Sealing Structures
Zhuo Wang; Yong Xu
Page(s): 185-192
Digital Object Identifier 10.1109/JMEMS.2007.911371 Abstract
| Full Text: PDF (1021 KB)
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Fabrication and Characterization of a Wafer-Level MEMS Vacuum Package With Vertical Feedthroughs
Junseok Chae; Giachino, J.M.; Najafi, K.
Page(s): 193-200
Digital Object Identifier 10.1109/JMEMS.2007.910258 Abstract
| Full Text: PDF (1167 KB)
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Design and Analysis of a Fault-Tolerant Coplanar Gyro-Free Inertial Measurement Unit
Tsung-Lin Chen
Page(s): 201-212
Digital Object Identifier 10.1109/JMEMS.2007.911372 Abstract
| Full Text: PDF (1082 KB)
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An Electrothermomechanical Lumped Element Model of an Electrothermal Bimorph Actuator
Todd, S.T.; Huikai Xie
Page(s): 213-225
Digital Object Identifier 10.1109/JMEMS.2007.908754 Abstract
| Full Text: PDF (606 KB)
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A Model for Predicting the Piezoresistive Effect in Microflexures Experiencing Bending and Tension Loads
Johns, G.K.; Howell, L.L.; Jensen, B.D.; McLain, T.W.
Page(s): 226-235
Digital Object Identifier 10.1109/JMEMS.2007.911874 Abstract
| Full Text: PDF (808 KB)
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