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Semiconductor Manufacturing Technology Workshop Proceedings, 2004

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Semiconductor Manufacturing Technology Workshop Proceedings, 2004

Date 9-10 Sept. 2004

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Title History

Semiconductor manufacturing technology workshop

Risk management in semiconductor industry

Just-in-time AMHS delivery for 300 mm FAB

Poster

Developing statistical models in an early warning system and its empirical study

Automatically form batch via real time dispatcher for furnace operation in 300 mm fab

Study of junction leakage caused by cobalt silicide defects

Inter-firm collaboration mechanism in process development and product design between foundry and fabless design house

Considerations for cleanroom control in different climatic regions

Effective methodology for killer defect management in 300 mm DRAM fab

An efficient yield enhancement from inline defect control and in-situ advanced process control

Multivariable control of multi-zone chemical mechanical polishing

Strategy and benefit analysis of water saving in 8" semiconductor fab

A tool portfolio elimination mechanism (TPEM) for a wafer fab

Optical maskless lithography for fast and low-cost design to wafer

Supply chain risk management

Global CD uniformity improvement for CAR masks by adaptive post-exposure bake with CD measurement feedback

Advanced processes

A simple method to fabricate single electron devices

The outlook for electronic systems and semiconductors

Metal corrosion and passivation swelling defect study of ultra low pattern density thick metal etch process

Process optimization by advanced process control with fault detection system for flash memory

Risk management strategy for semiconductor fabs - started from game theory

Supply chain driven - advanced target delivery system

Yield enhancement

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