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Industrial Electronics, 2003. ISIE '03. 2003 IEEE International Symposium on

Date 9-11 June 2003

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  • Robotic arm using flexible electrostatic film actuators

    Publication Year: 2003 , Page(s): 940 - 945 vol. 2
    Cited by:  Papers (1)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (885 KB) |  | HTML iconHTML  

    A 2-DOF robotic arm using flexible electrostatic film linear actuators named "dual excitation multiphase electrostatic drive" (DEMED) has been developed. DEMED consists of centimetric size stator and slider films, both are made of polyimide FPC (flexible printed circuit) films. These films contain three-phase parallel electrodes with a width of 100 μm at a regular interval of 200 μm. DEMED has unique characteristics, such as lightweight, high-power, and flexible. Since DEMED consists of only flexible films, it can be bent easily at any direction and can be driven even if it is deformed. Besides, it can drive a load without any reduction gears. The 2-DOF robotic arm has three actuators in its forearm and upper arm. In the upper arm, one actuator is arranged in bent state along the inside wall of the arm. In the forearm, a pair of actuators constructs antagonistic muscle-like structure. Since the structure has no reduction gears or driving belts, weight of the arm can be reduced. The upper arm and forearm actuators generate thrust force of 23 N and 10 N at 1.6 kV0-p respectively. Step responses of the two joints of the robotic arm were measured with feed back control system. Direct teaching playback control was performed utilizing the actuator's fine back-drivability. Finally, we discuss merits of utilizing DEMED. View full abstract»

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  • Group delay equalization of discrete-time filters

    Publication Year: 2003 , Page(s): 924 - 927 vol. 2
    Cited by:  Papers (3)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (400 KB) |  | HTML iconHTML  

    It is known that approximate linear phase frequency response may satisfy system requirements in many applications. In such cases, UR filters could replace with advantages what would otherwise be expensive linear phase FIR filters. For this purpose we developed a methodology for initially allocating poles and zeros of a group delay equalizer and then applying it to a computer aided optimization routine. Results showing its efficacy in providing fast convergence even in highly non-linear phase response equalizations are shown. View full abstract»

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  • Supervision language control of electromechanical drives

    Publication Year: 2003 , Page(s): 662 - 666 vol. 2
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (483 KB) |  | HTML iconHTML  

    The aim of this paper is to introduce a formal language based approach to the automatic supervision control of electromechanical drives. Modern applications often involve electromechanical drives with high dynamical complexity. The proliferation of these systems promises improved efficiency and reliability, reduced maintenance and operative costs, and a more environment friendly operation. However, they exhibit considerable complexities related with their behavior such as large uncertainties at a structural and parameter levels, multidimensionality, and strong mutual interactions. The integration of these systems with information processing techniques allows a better adaptive modeling of their behavior and thus better supervision concepts. Formal language techniques have been used in the past to study autonomous dynamical systems. Assuming the drive system as linguistic source, producing a certain language, the modeling framework is based on a formulation in terms of context-dependent grammars, distinguishing between information generated by the system and by the input control. Making use of the formal language descriptive characteristics the grammatical supervision algorithm governs the overall behavior of the drive. The formalism of the formal language based supervision control algorithm is presented and experimental results are discussed. View full abstract»

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  • An optimum design of boost power-factor-correction converter

    Publication Year: 2003 , Page(s): 735 - 740 vol. 2
    Cited by:  Papers (3)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (611 KB)  

    Designers trying to optimize the performance of boost PFC converter circuit faces many difficult circuit design issues. Most of prior researches chose the storage capacitor depending on the selected hold-up time or the output ripple percentage. Recently, the contribution of the output capacitor to the PFC system stability is highlighted. Therefore, in this issue the design steps are discussed depending on the three choices, output ripple, hold-up time and stability. It is clear that any design must take the minimum required storage capacitor as step-1 in the design and then apply for any other specification like hold-up time or ripple percentage. View full abstract»

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  • Analysis of a drive system consisting of two DC motors driving the Yankee drying cylinder of a tissue paper machine

    Publication Year: 2003 , Page(s): 1026 - 1031 vol. 2
    Cited by:  Papers (2)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (490 KB) |  | HTML iconHTML  

    In this paper the analysis of a drive system consisting of two D.C. motors driving the Yankee drying cylinder of a tissue paper machine is presented. Two 6-pulse thyristor converters connected to the same power transformer feed the motors. The motor, which has on it the tachogenerator to measure the speed, is the master motor and the other motor is the helper. Control logic is proposed to control the torque of the two DC motors. The control can be achieved in such a way that the two motors contribute equally to the total load when the DC motors are identical, or contribute partly to the total load and proportionally to their nominal torques, if the two motors are not identical. The adjustment of the acceleration time and the parameters of the controllers are investigated, in order to keep the armature current below the maximum permissible current as well as to achieve an optimum speed response of the system. The commissioning time can be reduced significantly, adjusting the acceleration time and the controllers' parameters, and so the distress of the system's electrical and mechanical parts can be avoided. Any possible damages caused by the rapid or unstable operation of the electrical and mechanical parts during commissioning and tests also can be avoided. A fine adjustment of the real system in less time during commissioning can be obtained after the determination of the acceleration time and controllers' parameters. The analysis of the system is realized using the SIMULINK software. Typical simulation results are presented. View full abstract»

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  • Selective harmonic eliminated pulse-width modulation technique (SHE PWM) applied to three-level inverter/converter

    Publication Year: 2003 , Page(s): 1112 - 1117 vol. 2
    Cited by:  Papers (7)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (498 KB) |  | HTML iconHTML  

    The main interest of this study has been granted to the selective harmonic eliminated pulse width modulation technique, SHE PWM, for the control of single-phase and three-phase full-bridge three-level inverters. This study makes for any angle number (even or odd) of switches that composes the inverter, for purpose of comparison with the results found for only odd number. We explain the resolution method procedure of the nonlinear equation systems in order to achieve the appropriate switching angles. The method of obtaining the best starting point is also described to overcome the problem of the choice of these points, which is one of most difficult tasks associated with the SHE PWM. Finally we validated the obtained results through some simulations by using MATLAB package. View full abstract»

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  • On fuzzy-DFE-LMS and fuzzy-DFE-RLS algorithms to equalize power line channels

    Publication Year: 2003 , Page(s): 1001 - 1006 vol. 2
    Cited by:  Papers (2)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (590 KB) |  | HTML iconHTML  

    This paper presents the DFE-Fuzzy-LMS and DFE-Fuzzy-RLS algorithms for equalization of power line channels (PLC) and for the improvement on the data transmission rates. Both proposals are DFE (decision feedback equalizer) versions of the adaptative singleton type 1 fuzzy algorithms initially proposed by J.M. Mendel. One of the most important characteristics of the proposals are their inherent capability to equalizer minimum, non-minimum and maximum phase channels and deal with higher power impulsive noises. The impulsive noise is one of the major problems concerning PLC channels. The Fuzzy-DFE-LMS technique applied to minimize both influences of the intersymbol interferences and impulsive noises shows better results than the traditional adaptive and previous fuzzy equalizers when the OFDM is employed as a multicarrier transmission technique. View full abstract»

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  • Ride-through alternatives for adjustable-speed drives-computational analysis

    Publication Year: 2003 , Page(s): 1032 - 1036 vol. 2
    Cited by:  Patents (1)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (632 KB) |  | HTML iconHTML  

    Adjustable speed drives (ASD) are recognized as very sensitive to power disturbances. Of the various power quality problems, the voltage sag appears to be the most relevant phenomenon. The device dependence on power quality problems can be attributed to the use of a highly sensitivity protection philosophy to prevent the equipment from high cost damages. Typical voltage sag occurrences may cause the frequency converter to completely shutdown with consequent loss of production and other undesired effects. To prevent this, some strategies can be used to improve the overall system/converter/load performance. Some are quite simple while others involve more complex solutions. Aiming to study the above, this paper uses a time domain simulation to represent the equipment, supply and corresponding load in a comprehensive way. By using this model in the SABER simulator, studies are carried out to illustrate the converter performance under voltage sag conditions with and without the inclusion of ride-through improvement strategies. The aim is to increase the equipment immunity to voltage disturbance considered. Computational results associated with a commercial type of VSI-PWM unit are given to clarify the work. View full abstract»

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  • Experimental validation of a mathematical modeling of single-phase active power filter

    Publication Year: 2003 , Page(s): 1077 - 1082 vol. 2
    Cited by:  Papers (1)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (461 KB) |  | HTML iconHTML  

    This work describes the experimental validation of a mathematical modeling of a single-phase PWM active power filter, previously proposed. This model has been developed using the PWM switch technique, created by Vorperian. Laboratorial tests have been developed to verify the validity of several proposed relationships like static gain, line-to-output and control-to-output transfer functions, using tests like step response and frequency response. Due to the narrow agreement between experimental and simulated results, the authors believe the functions developed can be widely employed to describe the system behavior, as well they can be used as support to various control strategies propositions. View full abstract»

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  • Electrostatic linear servo motor with built-in position sensor for vacuum environment

    Publication Year: 2003 , Page(s): 928 - 933 vol. 2
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (755 KB) |  | HTML iconHTML  

    A high-power electrostatic linear servo motor stage for vacuum environment has been developed. The stage is equipped with integrated built-in position sensor that uses the motor's electrode for position sensing. This stage is characterized by compact structure and low magnetic field emission. It can work within sufficiently small space in a vacuum chamber without disturbing surrounding electro-magnetic field. Therefore this motor stage could be highly compatible with many vacuum applications that utilize electron beam. In this paper, basic structure of the motor is described. The motor is sized 145 mm in length, 125 mm in width, and 40 mm in height. The stage is equipped with two thin plastic films, which contain three-phase electrodes aligned with an interval of 200 μm. Those two films are attached to slider and stator, respectively, to generate electrostatic thrust force. Linear cross-roller guide supports the slider. The stroke is 40 mm. The estimated thrust force in 10-3 Pa is 1.2 N with an applied voltage of 1.6 kV0-p. We have developed built-in position sensor for positioning servo control. Detail of built-in position sensor and results of positioning control are reported. View full abstract»

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  • Parameters estimation of induction motor using subspace methods

    Publication Year: 2003 , Page(s): 667 - 671 vol. 2
    Cited by:  Papers (1)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (455 KB) |  | HTML iconHTML  

    Parameter and speed estimation in induction motors is a research topic of wide interest. Good estimates of electrical parameters and motor speed are required for designing and tuning controllers of motor drive systems. This paper compares the efficiency of different parameter estimation techniques for characterizing an induction motor supplied by a voltage source inverter. Two of the techniques belong to the so called subspace identification method to estimate linear state space models and the other, is a standard prediction error method. The comparison is based on the experimental data acquired from a laboratory prototype microcomputer-based induction motor drive system. View full abstract»

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  • A multiobjective fuzzy PI controller based on genetic algorithm

    Publication Year: 2003 , Page(s): 672 - 677 vol. 2
    Cited by:  Papers (1)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (545 KB) |  | HTML iconHTML  

    This paper presents a fuzzy proportional-integral (PI) controller, which is a discrete-time version of a conventional PI controller. The data base as well as the constant PI control gains are optimized by using a genetic algorithm according to the following design specifications: minimizing the overshoot, the settling time and smoothing of the output curve. Thus, the optimization problem close to a multiobjective optimization one, resulting in an optimal fuzzy PI controller. Simulation results are shown to demonstrate the improvement over a conventional one. View full abstract»

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  • A fuzzy controller for an axial magnetic bearing

    Publication Year: 2003 , Page(s): 991 - 994 vol. 2
    Cited by:  Papers (1)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (555 KB) |  | HTML iconHTML  

    The use of magnetic bearings is very promising. The absence of mechanical friction and any type of contamination are some characteristics that justify their application in different industrial activities. To dominate this technology is necessary the study of diverse fields of electric engineering such as: electromagnetism, control, electrical machines, analog and digital systems and power electronics. Sophisticated techniques are necessary for the control of a magnetic bearing, because there are electrical non-linear relationship between the airgap and the current. In this work the fuzzy logic approach was use to design the controller. This technique allows the constructing of a control system based in a group of rules in a similar way as the human thought does. The use of this logic is justified in systems whose dynamic behavior is not well known. These rules were based on experimental results of a derivative proportional controller (PD) previously implemented and then tested through computer simulations. In order to compare theoretical results with experimental values, a test workbench was constructed. These results will be presented in this work. View full abstract»

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  • Improved hysteresis current control for active power filter

    Publication Year: 2003 , Page(s): 836 - 840 vol. 2
    Cited by:  Papers (4)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (483 KB) |  | HTML iconHTML  

    This paper presents an improved hysteresis current control to enhance the performance of current tracking control for active power filter while reduce the number of switching. This control technique utilizes the advantages of the fast dynamic response of the conventional hysteresis current control and the reduced switching number of the SVM scheme. While the current errors go beyond the outer hysteresis band, a suitable space voltage vector is selected to obtain fast current response, which corresponding the vector of the current error differential is of the largest partial vector in reverse direction of current error vector. Otherwise, the low harmonic current control of SVM is selected to track the reference current and limit the current error within the specified hysteresis band. A set of space vectors including the zero vectors to reduce the number of switching is determined from the information of the middle current error. Then a proper space vector selected according to the inner current error for better current. Lastly, the validity and rapidity of the proposed method are confirmed by experimental tests. View full abstract»

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  • Performance comparison of adaptive algorithms applied to acoustic echo cancelling

    Publication Year: 2003 , Page(s): 1147 - 1150 vol. 2
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (445 KB) |  | HTML iconHTML  

    In this paper, the convergence behaviors of fullband and sub-band LMS algorithms are compared for the acoustic echo canceling application. Post-filtering techniques for the reduction of the residual echo and noise are also described. Experimental results with measured speech signals are presented. View full abstract»

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  • Digital environment for simulation of electronic processes focused on an educational approach

    Publication Year: 2003 , Page(s): 1118 - 1122 vol. 2
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (895 KB) |  | HTML iconHTML  

    In this paper, the authors deal with the development of a digital environment for simulation of electronic processes. First and second orders models represent some important industrial processes. These models are present in the environment discussed on this paper. According to the authors, making of this software an important tool for operators training and teaching of engineering, specifically control and automation, adopt an educational approach. The processes are mathematically and physically modeled, allowing the user to verify the relationship between these two ways of representing a process. A high level of simplicity-of-use exists on this work because the software was developed using object-oriented language. View full abstract»

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  • The iterative learning control strategy for hybrid active filter to dampen harmonic resonance in industrial power system

    Publication Year: 2003 , Page(s): 848 - 853 vol. 2
    Cited by:  Papers (3)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (554 KB) |  | HTML iconHTML  

    This paper introduces application of iterative learning control strategy to hybrid active filter with the purpose of damping harmonics resonance in industrial power system. The control strategy can facilitate optimizing performance of damping harmonics resonance due to combination of feedback and feedforward learning control. In the hybrid filter, to obtain the proper reference voltage for voltage-source inverter based active filter, the feedback control scheme mainly focuses on the compensation of reactive power harmonic current and feedforward learning control puts its attention on tracking source voltage distortion and load harmonic current as fast as possible. The control strategy can also simplify configuration of the controller with only source current viewpoints and easy algorithm. The paper still establishes a set of strategy to self-optimizing performance of the system, and presents more useful criteria for identification of stable state of system incorporating reduction of THD of source current corresponding to reference voltage. Some simulation and experimental results based on 12-pulse rectifier system examined are given in the paper. View full abstract»

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  • Environment for random and sinusoidal vibration test control of an inverter-fed electrodynamic shaker

    Publication Year: 2003 , Page(s): 1093 - 1098 vol. 2
    Cited by:  Papers (1)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (669 KB) |  | HTML iconHTML  

    In this paper, an environment for random and sinusoidal vibration test control of an inverter-fed electrodynamic shaker is presented. This set-up is particularly applied on methods for testing of mechanical components based on the ANSI/ASAE standard EP455. First, the system configuration of an inverter-fed electrodynamic shaker and a LC filter is shown, as well as, the dynamic model of the plant is found, after, the control methods are discussed. Then, the technical development of the ACPS is described. The goal of the application is achieved from a software implementation on, which executes the proposed algorithm based on a robust model reference control law (MRC) with a repetitive controller (RC). The effectiveness of the proposed control scheme is verified by measured results. View full abstract»

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  • Analysis of a voltage clamp quasi-resonant DC-link used in high frequency DC-AC converters

    Publication Year: 2003 , Page(s): 758 - 763 vol. 2
    Cited by:  Papers (2)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (694 KB) |  | HTML iconHTML  

    To increase power density in power converters we can increase the switching frequency as this enables the use of smaller capacitors and inductors. However, this technique has the disadvantage of increasing power loss in the switches. We can solve this problem by using a quasi-resonant circuit in the inverter DC link (RDCL). This circuit reduces its output voltage when the inverter switches switch. This is therefore performed at zero voltage and the switching power losses are zero. RDCL is used before a DC/AC converter, and so its behaviour must be characterised for reference in the control design. This characterisation is also used for adopting the RDCL output impedance and the inverter input in order to improve the system dynamic response. In this work, we present the results of the behavioural analysis of a resonant DC-link structure. It is based on the structure described in [S.Y.R. Hui et el., January 1996]. The resonance frequency was increased to 1.5 MHz and this enabled the use of RDCL in combination with inverters switching at 200 kHz. As a result the magnetic component requirement was strict. Different simulations were made and a 1 kW prototype was built to monitor the behaviour under different conditions. View full abstract»

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  • Evaluation of the timing properties of two control networks: CAN and PROFIBUS

    Publication Year: 2003 , Page(s): 874 - 879 vol. 2
    Cited by:  Papers (3)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (682 KB) |  | HTML iconHTML  

    Due to the increased availability of low cost network technology, the use of networks to interconnect sensors, actuators and controllers is becoming widely accepted for the implementation of feedback control systems. Such type of feedback implementation, wherein the control loops are closed through a real-time network, are called network controlled systems (NCS). When implementing a NCS, the underlying communication network must provide a timely communication service, which must be adequate to fulfill the control application requirements. Therefore, the assessment of the network responsiveness to the real-time requirements of the control application is a fundamental issue. Both PROFIBUS and CAN networks are usually considered suitable to support small-scale NCS, due to their real-time capabilities. However their temporal responsiveness is highly dependent on both the timing characteristics of the supported message streams, such as its periodicity and the related message lengths. In this paper, we compare the timing properties of both CAN and PROFIBUS control networks. Basically, we assess their capability to support network controlled systems, through the evaluation of the related worst-case message's response time. A small example of a NCS is then used to assess the capability of the CAN control network to fulfill control application requirements. View full abstract»

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  • A CMOS mixed-signal interface with a RF transmitter for a micromachined soil moisture sensor

    Publication Year: 2003 , Page(s): 952 - 955 vol. 2
    Cited by:  Papers (1)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (558 KB) |  | HTML iconHTML  

    This paper describes a CMOS mixed-signal interface with a RF transmitter. This die is assembled in a multi-chip-module (MCM) micro-system together with the micromachined soil moisture sensor to achieve a cost-effective solution with accurate and reliable measurements for soil moisture in agriculture. The soil moisture probe, based on dual-probe heat-pulse (DPHP) method, is fabricated in bulk-micromachining technology. The DPHP method is based on the measurement of the maximum temperature rise at some distance from the heater, after applying a heat-pulse. The measurement of the temperature rise is obtained by subtracting soil temperature from the probe temperature. The mixed-signal interface Ls based on a pre-amplification stage and first-order sigma-delta modulator. The bit-stream output of the modulator is then applied to a counter as a first order decimation filter thus providing a 12-bit readout sample. Prior to transmission, data is encoded as a pulse width modulated (PWM) signal and then transmitted by means of an amplitude shift-keying (ASK) modulation. The transmitter features a VCO phase locked to the quartz crystal reference of 13.56 MHz to achieve a carrier frequency of 433.92 MHz. A RF power amplifier based on class E topology was chosen. The CMOS mixed-signal interface with a RF transmitter has been implemented in a single-chip using a standard CMOS process (AMI 0.7 μm, n-well, 2 metals and 1 poly). View full abstract»

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  • PNPACDA, Petri nets with places associated to continuous or discretized control algorithms for hybrid systems modelling

    Publication Year: 2003 , Page(s): 718 - 722 vol. 2
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (467 KB) |  | HTML iconHTML  

    In this design, analysis and implementation of the industrial automation systems, it is often observed that the modeling complexity can increase due to the different nature of the cooperating subprocesses in the system, some with continuous nature driven by events, i.e., due to its possible hybrid nature. Tools like the Petri nets and their derivates, such as the Grafcet, have proven their effectiveness in the discrete event systems modeling, characterizing the behavior and interaction of different cooperating subprocesses. The contributed formalism in such concepts as synchronism, concurrence, mutual exclusion, and resource sharing has a special interest. In this paper, a proposal for the integration in a unique Petri net model of different nature subsystems by means of the inclusion of places associated to continuous or discretized algorithms is presented for its application in the automated complex hybrid systems. View full abstract»

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  • Description of magnetic hysteresis effects in electrical drives by a circuit model approach

    Publication Year: 2003 , Page(s): 1037 - 1042 vol. 2
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (541 KB) |  | HTML iconHTML  

    In this paper a magnetic circuit model approach, which is able to describe hysteresis in electric machines, is presented. The method describes the ferromagnetic structure of an electric machine by a magnetic model circuit. Each part of the machine is described by permeances which can be linear or non linear, with hysteresis or not, in accordance with the material which this part is made of. The magnetic permeability needed to compute each permeance is described by Preisach's method. The presented model, based on Preisach's hysteresis scalar theory, allows to calculate not only the global hysteresis losses, but also the losses in each part of the machine as well as the distortion of the induced electromotive force (emf) and of the voltages. In order to verify this method, two cases have been examined: a) a transformer case; b) a switched reluctance drive. The first one has been experimentally tested the second one has been used to compare an alternative approach based on a FEM commercial package. View full abstract»

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  • Powerline communications using orthogonal frequency division multiplexing with a Gray code variation

    Publication Year: 2003 , Page(s): 1099 - 1103 vol. 2
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (467 KB) |  | HTML iconHTML  

    In this paper, the process in high-speed powerline communications are presented and computationally implemented. A simulation system with transmitter, channel and receiver is generated. The data transmission is simulated and the signal noise ratio (SNR) are collected. By analyzing the noise morphology in the detection process, propositions of changes in the modulation structure are done in order to take an adaptive system on the channel characteristics. View full abstract»

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  • Development of electrostatic levitation motor for vacuum condition

    Publication Year: 2003 , Page(s): 934 - 939 vol. 2
    Cited by:  Papers (1)
    Save to Project icon | Request Permissions | Click to expandQuick Abstract | PDF file iconPDF (640 KB) |  | HTML iconHTML  

    To drive a motor in vacuum condition, many factors must be considered, such as friction and heat generation. Since typical electromagnetic motors structurally have problems of friction and heat generation, it is difficult to use them in vacuum condition. Besides, in some vacuum applications like EB lithography, SEM, and TEM, electromagnetic motors are unlikely to be used since existence of electromagnetic field is a fatal problem. We propose an application of non-contact levitation electrostatic motor using dual excitation multiphase electrostatic drive (DEMED) system to those fields. We have developed a direct drive high-power electrostatic linear motor called DEMED. DEMED is a linear synchronous motor that consists of pairs of thin plates, stator and slider, and possesses a power per weight ratio of 230 W/kg and acceleration of over 100 G in an open loop systems in dielectric liquid. These performances are higher than those of typical electromagnetic drives. In this paper non-contact levitation and driving control system for DEMED is proposed. A levitation motor using DEMED utilizes the same electrodes for both levitation and driving. For controlling attractive force, bias voltage is superposed onto driving voltage. We have fabricated prototype motor with 2-DOF and have realized levitation drive control. The fabricated motor was operated at a speed of 20 mm/s with keeping a levitation gap of 200 μm. View full abstract»

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