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Optical MEMS, 2003 IEEE/LEOS International Conference on

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Optical MEMS, 2003 IEEE/LEOS International Conference on

Date 18-21 Aug. 2003

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Title History

Parallel photonics: based on VCSEL and microphotonics array

Adaptive optics for the human eye

Widely and discretely tunable laser using MEMS technology

Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

Application of VCSEL's to a range of bioengineering assays

Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide

Characteristics of 1D and 2D optical scanning epi-Si-mirror devices

Torsional mirror with X-shaped cross-sectional torsional beam

A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

High-speed optical performance monitor for WDM network using MEMS scanning mirror

Assembled MEMS VOA

Photonic crystal waveguide characterisation for MEMS applications

Biaxial MEMS raster scanner with linear ramp drive

Micromachined polarization beam splitters for the visible spectrum

Replicated optical MEMS in sol-gel materials

Crystalline Si-based in-plane tunable Fabry-Perot filter with wide tunable range

Integration of the fabrication processes and wafer level packaging of MEMS devices using localized induction heating

Two-axis scanning mirror for free-space optical communication between UAVs

A micromachined 4-port optical switch with no propagation length difference for add drop modules

Hybrid optical assembly technique for tunable optical filter arrays

Fabrication and some measurement of a digital variable optical attenuator

47 nm tuning of thermally actuated Fabry-Perot tunable filter with very low power consumption

Packaging technology for wavelength tunable filter based on optical MEMS

Programmable microshutter arrays for the JWST NIRSpec

Femtosecond direct space-to-time pulse with MEMS micromirror arrays

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