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Demonstrated Micromachining Technologies for Industry (Ref. No. 2000/032), IEE Seminar on

Date 2000

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Displaying Results 1 - 10 of 10
  • Silicon resonant strain gauges fabricated using SOI wafers

    Publication Year: 2000 , Page(s): 2/1 - 2/4
    Save to Project icon | Click to expandAbstract | PDF file iconPDF (312 KB)  

    This paper details the design and fabrication process for a dynamically balanced silicon resonator. To optimise the degree of dynamic balance extensive finite element modelling (FEM) of the mechanical structure was carried out. A method of driving and detecting the optimum mode of the resonator was chosen in order to avoid compromising the mechanical design of the structure. The degree of dynamic ... View full abstract»

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  • Closed chamber PCR-chips for DNA amplification

    Publication Year: 2000 , Page(s): 4/1 - 4/5
    Save to Project icon | Click to expandAbstract | PDF file iconPDF (416 KB)  

    The polymerase chain reaction (PCR) is a well described method for the selective identical replication of DNA molecules. By an enzymatic in-vitro amplification process, the concentration of a DNA species is nearly doubled in a process, stepping through three different temperatures. In this way, the DNA concentration can be multiplied more than million-fold by 20 to 30 cycles of temperature. The ad... View full abstract»

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  • MST manufacturing via design house/foundries

    Publication Year: 2000 , Page(s): 10/1 - 10/5
    Save to Project icon | Click to expandAbstract | PDF file iconPDF (600 KB)  

    Foundry relationship eliminates many of the restrictions to the exploitation of MST. Foundry offer satisfies customer needs and lowers risk and development costs and eases transfer to manufacture. Provides innovative UK engineers a chance to take up the opportunities offered by MST View full abstract»

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  • Microelectrodischarge machining for MEMS applications

    Publication Year: 2000 , Page(s): 6/1 - 6/4
    Save to Project icon | Click to expandAbstract | PDF file iconPDF (196 KB)  

    The accuracy of micro-hole production is dependent on the way in which micro-electrode production is carried out. We are now encountering the problem of material microdefects that are becoming significant in microengineered products made from multicrystalline metals. The quality of the print head is dependent therefore not only on the micromachining processes involved in its fabrication but also o... View full abstract»

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  • Tuning of vibrating micromechanical resonators using a focused ion beam

    Publication Year: 2000 , Page(s): 3/1 - 3/5
    Save to Project icon | Click to expandAbstract | PDF file iconPDF (400 KB)  

    The permanent tuning of the resonant frequency of in-plane vibrating micromechanical resonators is discussed, with particular reference to the tuning of the suspension stiffness rather than tuning of the mass. Iterative frequency tuning of laterally resonant electrostatic comb-drive microactuators by focused ion beam machining is demonstrated View full abstract»

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  • Advanced micromechanical prototyping in polysilicon and SOI

    Publication Year: 2000 , Page(s): 8/1 - 8/4
    Cited by:  Papers (1)
    Save to Project icon | Click to expandAbstract | PDF file iconPDF (452 KB)  

    The importance of achieving stable MEMS processes is discussed with particular reference to the DERA polysilicon sacrificial surface micromachining (SSM) and silicon-on-insulator (SOI) high aspect ratio micromachining (HARM) processes. DERA has recently made these processes available to universities through EPSRC and directly to industry. It has also formed a strategic partnership with a leading M... View full abstract»

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  • Europractice-microsystems activities in Framework 5

    Publication Year: 2000 , Page(s): 9/1 - 9/10
    Save to Project icon | Click to expandAbstract | PDF file iconPDF (568 KB)  

    Reduces the barriers to entry for users: access to information; lower cost prototyping; and first user software licences. Improves the supply of skilled technical staff: Euro-training courses for industry; technology transfer from institutes; and university graduates with project experience. Increases awareness of technology and its benefits; publicity for case studies; and techno-economic trainin... View full abstract»

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  • Multilayer electroformed devices on silicon substrates

    Publication Year: 2000 , Page(s): 5/1 - 5/4
    Cited by:  Patents (1)
    Save to Project icon | Click to expandAbstract | PDF file iconPDF (480 KB)  

    A simple, low-temperature UV electroforming process has been described which is capable of producing multi-level nickel devices on silicon substrates. The process has been used to realise two-axis electrostatic resonators, in which resonant excitation and electrothermal tuning have been demonstrated View full abstract»

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  • Surface tension powered self-assembly of 3D MOEMS devices using DRIE of bonded silicon-on-insulator wafers

    Publication Year: 2000 , Page(s): 1/1 - 1/6
    Cited by:  Papers (1)  |  Patents (7)
    Save to Project icon | Click to expandAbstract | PDF file iconPDF (728 KB)  

    Surface tension powered self-assembly is a technique for mass parallel fabrication of 3D micro-electro-mechanical systems (MEMS) from surface micromachined parts, which are rotated out-of plane by the surface tension of pads of a meltable material. Recently, we have demonstrated a simple two-mask process based on mechanical parts formed from 4 inch industry-standard bonded silicon-on-insulator (BS... View full abstract»

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  • Demonstrated micromachining technologies for industry

    Publication Year: 2000 , Page(s): 0_1
    Save to Project icon | Click to expandAbstract | PDF file iconPDF (40 KB)  

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