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Microelectronic Test Structures, 1992. ICMTS 1992. Proceedings of the 1992 International Conference on

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Microelectronic Test Structures, 1992. ICMTS 1992. Proceedings of the 1992 International Conference on

Date 16-19 March 1992

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Title History

ICMTS 92. Proceedings of the 1992 International Conference on Microelectronic Test Structures (Cat. No.92CH3102-1)

Three-dimensional effects of latchup turn-on CMOS and forward-biased n⁺-diode measured by photoemission

CMOS-ASIC life-predictions from test-coupon data

Extracting contact misalignment from 4- and 6-terminal contact resistors

A new and simple test structure for evaluating the sectional photo-sensitivity distribution of pixels in a frame-transfer CCD image sensor

Measurement and parameter extraction of submicron VLSI MOSFET test structures

Test structure for the detection, localization and identification of short circuits with a high speed digital tester

An investigation of MOSFET statistical and temperature effects

Yield test structures and their use for process development

Suppression of measurement errors in effective-MOSFET-channel-length extraction

A simple method to measure very low currents to evaluate the effect of damage caused by contact formation near the isolation edges in high-density LSIs

Test structure and experimental analysis of bipolar hot-carrier degradation including stress field effect

Inverse modeling for doping profile extraction in the presence of interface traps

The use of a digital multiplexer to reduce process control chip pad count

A study of clustering using microelectronic defect monitors

Issues with contact defect test structures

A modular 0.7 μm CMOS JESSI test chip for multi purpose applications

An analytical strategy for fast extraction of MOS transistor DC parameters applied to the SPICE M)53 and BSIM models

New failure analysis technique of ULSIs using photon emission method

A new method and test structure for easy determination of femto-farad on-chip capacitances in a MOS process

A new latch-up test structure for practical design methodology for internal circuits in the standard cell-based CMOS/BiCMOS LSIs

Life time evaluation of MOSFET in ULSIs using photon emission method

Critical dimension measurements by electron and optical beams for the establishment of linewidth standards

Automatic test chip and test program generation: an approach to parametric test computer-aided design

A new method for electrically measuring thin-film thickness of SOI MOSFETs

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