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2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)

Date 9-10 July 2012

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  • UGIM 2012 [Title page]

    Publication Year: 2012, Page(s): i
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  • UGIM 2012 copyright page

    Publication Year: 2012, Page(s): i
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  • UGIM 2012 Welcome Message

    Publication Year: 2012, Page(s): i
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  • UGIM 2012 Committees

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  • UGIM 2012 Program

    Publication Year: 2012, Page(s):i - iv
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  • UGIM 2012 Table of contents

    Publication Year: 2012, Page(s):i - iii
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  • UGIM 2012 Author Index

    Publication Year: 2012, Page(s):i - ii
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  • CLEAN: From Limbo to LIMS

    Publication Year: 2012, Page(s):1 - 3
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (429 KB) | HTML iconHTML

    In the late 1990s Dr. Alan McLelland of the Institute of Biochemistry, Royal Infirmary, Glasgow highlighted the multi-faceted nature of a LIMS (Laboratory Information Management System) by pointing out how it is perceived by an analyst, a laboratory manager, an information systems manager, and an accountant, "all of them correct, but each of them limited by the users' own perceptions." [1] At Harv... View full abstract»

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  • Modified Adaptive Control of a 10,000 Square Foot Cleanroom Using Particle Counters to Maintain Design Specifications and Reduce Energy Consumption

    Publication Year: 2012, Page(s):1 - 2
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (148 KB) | HTML iconHTML

    As the post-construction resident facilities management team, we present the iterative steps planned and taken in order to reduce the energy profile of a 10,000 GSF, Class 100 - 10,000 research cleanroom. These steps have been planned and taken without sacrifice to initial design requirement or hindrance to installed ''tools''. We describe the process of taking a finished design and fully construc... View full abstract»

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  • A Lean and Sustainable User Access System for a University Microfabrication Laboratory

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (74 KB) | HTML iconHTML

    Summary form only given. The objective of this project is to develop a user access system for the Microscale Process Engineering Laboratory (MPEL) at San Jose State University (SJSU). The system implements hardware/software locks that limit tool use to authorized users only. The MPEL at SJSU is a 5,000 sq. ft. instructional facility that is also used for research projects and industry collaboratio... View full abstract»

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  • Implementing a Software Based User Access System in a Core Analytical Lab: Benefits and Challenges

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (92 KB) | HTML iconHTML

    Summary form only given. The management of a university analytical lab has many facets. From billing, tool reservations, maintenance and performance metrics, there are many aspects best served by a software based package to assist in day to day operations. As lab instrumentation and usage grow, there is simply too much of the above mentioned information to track without some form of automated syst... View full abstract»

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  • Badger Lab Management Software

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (79 KB) | HTML iconHTML

    Summary form only given. Stanford University has actively supported the development of lab management software since the late 1990's. The Coral application, developed at Stanford, was popular for over a decade. The latest offering in this evolving process is Badger Lab Management Software. The Badger application is a robust and flexible, client/server architecture application that can support mult... View full abstract»

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  • Mercury Lab Management Software

    Publication Year: 2012, Page(s):1 - 2
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (578 KB) | HTML iconHTML

    Mercury is a system that helps management, staff, and members efficiently use laboratory resources. Mercury emphasizes accounting by utilizing a double entry accounting system: lab activities are recorded and debited/credited to the appropriate accounts in real-time. It is a Management Information System or more appropriately a Member Information System. The software is named Mercury after the Rom... View full abstract»

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  • Nanofabrication Lab Security Project

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (80 KB) | HTML iconHTML

    Summary form only given. Nanofabrication laboratories have well established programs to protect the health and safety of researchers and the nearby communities, but programs to protect the security of reagents and hazardous process gases are just getting started, particularly at universities. Enforcement of security and export regulation has increased. A survey of 51 people (more than half lab man... View full abstract»

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  • Micro and Nano R&D Fab Safety, Inert Gas Reduction: A Lean Six-Sigma Approach

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (302 KB) | HTML iconHTML

    This paper will present the lean six sigma approach that was utilized to identify and analyze factors critical to creating a safe work environment, while reducing the use of these inert gases within the MNST laboratories and cleanroom. After an inventory of all inert gas sources in MNST was conducted, actions were identified utilizing guidelines outlined in the CGA P-1-2008 pamphlet.2 This initiat... View full abstract»

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  • The Development of a Formal Emergency Response Team for a Populous University Clean Room in a Dense Urban Setting

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (69 KB) | HTML iconHTML

    A campus-based emergency response team can greatly augment the overall safety infrastructure of a university cleanroom. Here we present the components needed to develop an effective emergency response team capable of responding to emergencies that may occur within Harvard University's Center for Nano-scale Systems clean room facility (a site specific emergency response team). A team has been forme... View full abstract»

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  • Safety Considerations in Building Ultra-High Vacuum Plasma Enhanced Chemical Vapor Deposition System for Low Temperature Group IV Epitaxy

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (123 KB) | HTML iconHTML

    A state-of-the-art chemical vapor deposition tool has been designed and built at the Photovoltaics Lab, Department of Electrical Engineering in the Engineering Research Center for depositing epitaxial films of group IV elements and their alloys. Due to the use of extremely toxic and flammable/pyrophoric gases safety and process integrity was built into the design right from the get go. College and... View full abstract»

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  • Facilities Planning for Safety & Emergency Response: Bridging the Gap between Design Features and Safety Planning

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (197 KB) | HTML iconHTML

    This paper will present three key components of the platform required for safe operation and emergency response in micro and nanotechnology facilities. These include a) an overview of design features incorporated into facility design, b) common approaches to safety and emergency response planning, and c) bridging the gap between these two so that they are well integrated at the time of facility tu... View full abstract»

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  • An Overview of Daily Operations at the VINSE Core Laboratories

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (958 KB) | HTML iconHTML

    Vanderbilt University maintains a 1635 sq. ft. class 10,000 cleanroom facility to support the teaching, research and outreach objectives of the Vanderbilt Institute of Nanoscale Science and Engineering (VINSE). Operating since 2004 the facility is a shared, multi-user laboratory space that services the research and training needs of at least 19 independent groups from across the Vanderbilt campus,... View full abstract»

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  • Web-Based Content Management System for Equipment Information

    Publication Year: 2012, Page(s): 1
    Cited by:  Papers (1)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (106 KB) | HTML iconHTML

    Summary form only given. Our lab has developed a database driven content management system for lab members to obtain up to date information on the status and availability of tools from any web browser. The system displays whether a tool is up, down or in a caution state. It provides a calendar of upcoming reservations-either in-browser or as an ical file. Tools can be pinpointed on a map. Tool spe... View full abstract»

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  • Process Definition Spreadsheet for Run Card Creation

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (94 KB) | HTML iconHTML

    Retention and dissemination of microfabrication process knowledge is a challenge for most university clean room facilities. Many new graduate student researchers arrive with little or no microfabrication experience and do not possess an understanding of the effects of process variables. For these researchers, well-documented standardized processes give a solid starting point to learn the steps the... View full abstract»

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  • A Practical Comparison of Mask Making Pattern Generation Systems

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (69 KB) | HTML iconHTML

    A Practical Comparison of Mask Making Pattern Generation Systems Kevin Hensley Utah Nanofab, College of Engineering, University of Utah Category: Equipment acquisition, capability development Three mask making systems utilizing different pattern generation technologies were evaluated. The systems include laser direct write (Heidelberg MicroPG), variable aperture UV mercury arc lamp exposure (Elect... View full abstract»

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  • A Phosphine Sub Atmospheric Delivery System (SADS) Applied to Low Pressure Chemical Vapor Deposition (LPCVD) of In-Situ Doped Polysilicon

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (108 KB) | HTML iconHTML

    A phosphine SADS has been fitted to a conventional LPCVD furnace system. Through careful design and implementation, we have demonstrated an inherently safe system with significantly lower infrastructure requirements and costs that meet all semiconductor industry safety requirements. View full abstract»

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  • Key Considerations for Selection of Diffusion Furnaces

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (86 KB) | HTML iconHTML

    Diffusion furnaces are an integral part of nano and micro-fabrication. Research micro-fabrication labs often face the challenge of selecting furnaces that can minimize cost and space requirements, while maximizing process flexibility. This presentation will discuss several LPCVD and atmospheric furnace options that labs may find useful when selecting furnaces for their facility. View full abstract»

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  • FY11 Financial and Operational Survey of Major University Nanofabrication Facilities

    Publication Year: 2012, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (66 KB) | HTML iconHTML

    The primary intent of this survey is to provide all interested parties (researchers, management, users, administration, and support staff) with a well-vetted updated set of data upon which a constructive discourse may be established regarding operational costs, tool rates, staffing, safety, and basic efficiency guidelines of a complex nanofabrication facility. Secondarily, the authors also aim to ... View full abstract»

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