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Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on

Date 5-8 March 2012

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  • [Front cover]

    Publication Year: 2012 , Page(s): c1
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  • Welcome message

    Publication Year: 2012 , Page(s): 1 - 2
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  • [Copyright notice]

    Publication Year: 2012 , Page(s): 1
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  • IEEE-NEMS 2012 general chair

    Publication Year: 2012 , Page(s): 1 - 4
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  • Conference sponsors

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  • Conference at a glance

    Publication Year: 2012 , Page(s): 1
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  • IEEE-NEMS 2012 program schedule

    Publication Year: 2012 , Page(s): 1 - 32
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  • Table of contents

    Publication Year: 2012 , Page(s): 1 - 16
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  • Author index

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  • NEMS based tools for nanoscience and atomic clocks

    Publication Year: 2012 , Page(s): 1 - 2
    Request Permissions | Click to expandAbstract | PDF file iconPDF (591 KB) |  | HTML iconHTML  

    Nanoscience is a thriving multi-disciplinary activity, which aims at understanding the properties and the interaction of very small objects on the nanometer scale. In this endeavor, tools for the observation, analysis and modification of individual objects like macromolecules, clusters or even single atoms are required. The development of dedicated microfabricated instruments to measure physical a... View full abstract»

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  • Beyond Watson and Crick: Programming DNA self-assembly for nanofabrication

    Publication Year: 2012 , Page(s): 1 - 2
    Request Permissions | Click to expandAbstract | PDF file iconPDF (1064 KB) |  | HTML iconHTML  

    The specificity of Watson-Crick base-pairing allows great control over the design and synthesis of artificial DNA nanostructures. Periodic one-dimensional (1D) tubes, 2D lattices, and 3D crystals are easily created from “DNA tiles” with spacings of 10-20 nanometers. “DNA origami” allows the folding of long DNA strands into arbitrary shapes and patterns up to about 100 n... View full abstract»

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  • Recent advances on nano-materials for advanced packaging applications

    Publication Year: 2012 , Page(s): 1
    Request Permissions | Click to expandAbstract | PDF file iconPDF (111 KB) |  | HTML iconHTML  

    The advance of semiconductor technology is mainly due to the advances of materials, especially polymeric materials. These include the use of polymers as: resists (for deep submicron lithography), adhesives (both conductive and non conductive for die attach and assembly interconnects), interlayer dielectrics (low k, low loss dielectrics for high speed and low loss signal transmission), encapsulants... View full abstract»

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  • Printed carbon nanotube devices and their applications

    Publication Year: 2012 , Page(s): 1 - 2
    Request Permissions | Click to expandAbstract | PDF file iconPDF (619 KB) |  | HTML iconHTML  

    Printed electronics represents a paradigm shift in electronics manufacturing after 50 years of development in silicon microelectronics. Manufacturing of electronic devices by printing can significantly reduce the equipment investment which is nowadays astronomical in the latest generation of very large scale integrated circuits manufacturing. Printing is an additive process where electronic materi... View full abstract»

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  • Sensing and noise characteristics of si-nanowire ion-sensitive-field-effect-transistors for future biosensor applications

    Publication Year: 2012 , Page(s): 1
    Request Permissions | Click to expandAbstract | PDF file iconPDF (29 KB) |  | HTML iconHTML  

    Si-nanowire biologically-active field effect transistors (Si-NW BioFETs) have been considered recently for biosensing applications because the nanowire structures with the high surface-to-volume ratio are capable of detecting extremely low concentration of biomolecules in solution. Charges from specific binding of biomolecules on the surface of nanowires can affect the channel conductance of the e... View full abstract»

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  • Atomic resolution nanofabrication and dynamic characterization

    Publication Year: 2012 , Page(s): 1 - 2
    Request Permissions | Click to expandAbstract | PDF file iconPDF (1248 KB) |  | HTML iconHTML  

    Summary form only given. Experiments on individual nanoparticles are generally difficult but can be carried out by the techniques of modern in-situ electron microscopy. With the continuous improvement of in situ techniques inside transmission electron microscope (TEM), the capabilities of TEM extend beyond structural characterization to high-precision nanofabrication and property measurement, whic... View full abstract»

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  • Nanopatterning by phase change nanolithography

    Publication Year: 2012 , Page(s): 1 - 2
    Request Permissions | Click to expandAbstract | PDF file iconPDF (401 KB) |  | HTML iconHTML  

    Several techniques such as the electron beam technology and ion beam technology are employed to obtain the high resolution nanopatterns. However, these techniques cause some problems, for example, the vacuum installation, high voltage power supply and low throughput, which consequently make these techniques more expensive. On the other hand, the organic resists used for lithography are important t... View full abstract»

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  • Portable e-nose based on polymer/CNT sensor array for protein-based detection

    Publication Year: 2012 , Page(s): 1 - 6
    Cited by:  Papers (3)
    Request Permissions | Click to expandAbstract | PDF file iconPDF (1386 KB) |  | HTML iconHTML  

    Portable electronic nose (e-nose) consisting of polymer/carbon nanotube (CNT) sensor array was developed to detect protein-based foods. Gas sensors were fabricated by spin-coating functionalized CNT/polymer nanocomposite materials onto interdigitated electrodes. The sensors were tested with various types of volatile compounds such as ammonia, amine compounds, acetic acid, water and organic solvent... View full abstract»

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  • Multilayer graphene growth by a metal-catalyzed crystallization of diamond-like carbon

    Publication Year: 2012 , Page(s): 7 - 10
    Request Permissions | Click to expandAbstract | PDF file iconPDF (739 KB) |  | HTML iconHTML  

    Graphene has attracted significant attention due to its excellent electrical, optical, mechanical and thermal properties. In the paper, we report a simple and efficient growth method of multilayer graphene using a metal-catalyzed crystallization of diamond-like carbon (DLC) by thermal annealing without any extraneous carbon sources. The Ni/DLC/Si multilayered structure was fabricated on silicon su... View full abstract»

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  • Chemical vapor deposition of nanocrystalline graphene directly on arbitrary high-temperature insulating substrates

    Publication Year: 2012 , Page(s): 11 - 14
    Request Permissions | Click to expandAbstract | PDF file iconPDF (521 KB) |  | HTML iconHTML  

    Large area uniform nanocrystalline graphene is grown by chemical vapor deposition on arbitrary insulating substrates that can survive ~1000 °C. The as-synthesized graphene is nanocrystalline with a domain size in the order of ~10 nm. The material possesses a transparency and conductivity similar to standard graphene fabricated by exfoliation or catalysis. A noncatalytic mechanism is propose... View full abstract»

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  • Characterization of strain fields in graphene films

    Publication Year: 2012 , Page(s): 15 - 18
    Request Permissions | Click to expandAbstract | PDF file iconPDF (824 KB) |  | HTML iconHTML  

    This paper reports on the Raman shifts corresponding to strain induced in graphene films. A direct correlation is demonstrated between the shifts in the D, G and 2D peaks of graphene compared to the characteristic 521cm-1 peak of the underlying silicon substrate. The approach is shown to be suitable for characterizing the graphene Raman spectrum under load conditions. View full abstract»

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  • Transfer-free fabrication of suspended graphene grown by chemical vapor deposition

    Publication Year: 2012 , Page(s): 19 - 22
    Cited by:  Papers (1)
    Request Permissions | Click to expandAbstract | PDF file iconPDF (830 KB) |  | HTML iconHTML  

    Graphene, a true two-dimensional material with extraordinary mechanical- and electronic properties, is thought to be ideal for nanoelectromechanical systems (NEMS), like mass- and force sensors. Here, we present two different ways to fabricate suspended graphene for the intended use in future NEMS applications. The fabrication schemes do not require transfer of graphene from a catalyst where the g... View full abstract»

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  • Photovoltaic response of N-doped graphene-based photodetector

    Publication Year: 2012 , Page(s): 23 - 26
    Request Permissions | Click to expandAbstract | PDF file iconPDF (823 KB) |  | HTML iconHTML  

    In this paper, photovoltaic response has been found in an N-doped graphene based photodetector with metal-graphene-metal structure. Raman and XPS spectra indicate that nitrogen atoms are doped into the graphene after synthesized in a CVD system by introducing CH4 and NH3. With the semiconducting behavior of I-V curves, N-doping graphene exhibits an opened band-gap, which gene... View full abstract»

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  • Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate

    Publication Year: 2012 , Page(s): 27 - 30
    Request Permissions | Click to expandAbstract | PDF file iconPDF (1447 KB) |  | HTML iconHTML  

    In this study, micro lens arrays (MLAs) fabrication process was carried out using flexible replica mold and an original roll press UV imprint system. We successfully demonstrated MLAs fabrication process with high throughput. The lens patterns of 30 × 100 mm2 in area replicated by two photo-curable resins were formed on the quartz substrate of 0.15 mm in thickness. This fabricati... View full abstract»

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  • Fabrication metal roller mold with sub-micrometer feature size based on contact printing photolithography

    Publication Year: 2012 , Page(s): 31 - 35
    Request Permissions | Click to expandAbstract | PDF file iconPDF (1047 KB) |  | HTML iconHTML  

    This paper presents an innovative approach for directly forming surface micro-structures at sub-micrometer scale on the cylindrical surface of a metal roller. This roller can then serve as a roller mold in roller imprinting processes for large-area micro/nano-fabrication. The key element in this roller mold fabrication mold processes is a new type of contact-printing method with can transfer a pat... View full abstract»

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  • Fabrication of metal embedded photo-mask for sub-micrometer scaled photolithography and patterning sapphire substrate

    Publication Year: 2012 , Page(s): 36 - 39
    Request Permissions | Click to expandAbstract | PDF file iconPDF (1371 KB) |  | HTML iconHTML  

    This paper describes the fabrication processes of a new type of metal-embedded photo-mask, which will be used in standard photolithography and for fabricating patterned sapphire substrates. This new metal-embedded photo-mask is prepared by metal contact printing lithography and therefore can easily achieve smaller feature size around or below 1 μm. Besides its easiness in fabricating and ob... View full abstract»

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