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Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on

Date 9-11 April 2008

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Displaying Results 1 - 25 of 95
  • [Title page]

    Publication Year: 2008 , Page(s): I
    Save to Project icon | PDF file iconPDF (266 KB)  
    Freely Available from IEEE
  • [Copyright notice]

    Publication Year: 2008 , Page(s): II
    Save to Project icon | PDF file iconPDF (191 KB)  
    Freely Available from IEEE
  • Introduction

    Publication Year: 2008 , Page(s): III
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    Freely Available from IEEE
  • [Blank page]

    Publication Year: 2008 , Page(s): IV
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    Freely Available from IEEE
  • Symposium committees

    Publication Year: 2008 , Page(s): V - VI
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    Freely Available from IEEE
  • Table of contents

    Publication Year: 2008 , Page(s): VII - XIII
    Save to Project icon | PDF file iconPDF (1099 KB)  
    Freely Available from IEEE
  • [Blank page]

    Publication Year: 2008 , Page(s): XIV
    Save to Project icon | PDF file iconPDF (188 KB)  
    Freely Available from IEEE
  • Invited talk 1: Integrative MEMS/NEMS technology for micro and nano systems

    Publication Year: 2008 , Page(s): 1
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (145 KB)  

    Materials technology and process integration are the key enabling tools for novel advances in MEMS/NEMS for future biological and chemical micro and nano systems applications. The talk presents an overview of various building block materials and process technologies. View full abstract»

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  • The failure mechanisms of micro-scale cantilevers in shock and vibration stimuli

    Publication Year: 2008 , Page(s): 2 - 7
    Cited by:  Papers (1)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (7022 KB) |  | HTML iconHTML  

    Contemporary shock testing of micro-devices is carried out in controlled test environments where test parameters can be monitored with current metrology techniques. Due to demanding environments and limited scope of design rules, the reliability of micro devices has become a concern. A modified Hopkinson pressure bar (HPB) is used to investigate failure mechanisms of single crystal silicon (SCS) micro-cantilever devices under high-g accelerations. Response upon impact is monitored using high speed imaging (HSI) to ascertain the cause of failure. White light interferometry (WLI) and scanning electron microscopy (SEM) are used as post analysis techniques to investigate cause of failure and fracture topography. The modified HPB method in conjunction with high speed imaging allowed valid prediction of modal and temporal failure information of the micro cantilevers. WLI investigated the effects of deep reactive ion etching (DRIE) etching on crack instigation. SEM identified octahedral cleavage of SCS as the dominant failure mechanism of the micro-cantilevers. View full abstract»

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  • Micro-tensile tests on micromachined metal on polymer specimens: Elasticity, plasticity and rupture

    Publication Year: 2008 , Page(s): 8 - 10
    Cited by:  Papers (1)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (2348 KB) |  | HTML iconHTML  

    This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on ldquolow costrdquo specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures. View full abstract»

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  • Mechanical fatigue on gold MEMS devices: Experimental results

    Publication Year: 2008 , Page(s): 11 - 15
    Cited by:  Papers (3)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (1979 KB) |  | HTML iconHTML  

    The effect of mechanical fatigue on structural performances of gold devices is investigated. The pull-in voltage of special testing micro-systems is monitored during the cyclical load application. The mechanical collapse is identified as a dramatic loss of mechanical strength of the specimen. The fatigue limit is estimated through the stair-case method by means of the pull-in voltage detections. Measurements are performed by means of the optical interferometric technique. View full abstract»

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  • Open ended microwave oven for packaging

    Publication Year: 2008 , Page(s): 16 - 20
    Cited by:  Papers (4)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (3058 KB) |  | HTML iconHTML  

    A novel open waveguide cavity resonator is presented for the combined variable frequency microwave curing of bumps, underfills and encapsulants, as well as the alignment of devices for fast flip-chip assembly, direct chip attach (DCA) or wafer-scale level packaging (WSLP). This technology achieves radio frequency (RF) curing of adhesives used in microelectronics, optoelectronics and medical devices with potential simultaneous micron-scale alignment accuracy and bonding of devices. In principle, the open oven cavity can be fitted directly onto a flip-chip or wafer scale bonder and, as such, will allow for the bonding of devices through localised heating thus reducing the risk to thermally sensitive devices. Variable frequency microwave (VFM) heating and curing of an idealised polymer load is numerically simulated using a multi-physics approach. Electro-magnetic fields within a novel open ended microwave oven developed for use in micro-electronics manufacturing applications are solved using a dedicated Yee scheme finite-difference time-domain (FDTD) solver. Temperature distribution, degree of cure and thermal stresses are analysed using an Unstructured Finite Volume method (UFVM) multi-physics package. The polymer load was meshed for thermophysical analysis, whilst the microwave cavity - encompassing the polymer load - was meshed for microwave irradiation. The two solution domains are linked using a cross mapping routine. The principle of heating using the evanescent fringing fields within the open-end of the cavity is demonstrated. A closed loop feedback routine is established allowing the temperature within a lossy sample to be controlled. A distribution of the temperature within the lossy sample is obtained by using a thermal imaging camera. View full abstract»

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  • Automatic wire bonder designed for MEMS packaging

    Publication Year: 2008 , Page(s): 21 - 23
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (2191 KB) |  | HTML iconHTML  

    This paper introduces zoom microscope into the microscope positioning system to settle the contradiction between microscopepsilas visual range and depth of field. In the whole bonding application, bond targetspsila identification and orientation are the most important aspects for full-automation. Multiple scale images go through various image processing programs, and finally different bond targets are identified and positioned This measure is called ldquoglobal-coarse and local-precise orientationrdquo, with which full-automation bonding is realized. A zoom microscope based micro-positioning system was used to capture the multiple magnification images. The requirement for real-time auto-focusing for zoom microscope is proposed based on the analysis of zoom microscope model. View full abstract»

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  • Package hermeticity testing with thermal transient measurements

    Publication Year: 2008 , Page(s): 24 - 27
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (2683 KB) |  | HTML iconHTML  

    The rapid incursion of new technologies such as MEMS and smart sensor device manufacturing requires new tailor-made packaging designs. In many applications these devices are exposed to humid environments. Since the penetration of moisture into the package may result in internal corrosion or shift of the operating parameters, the reliability testing of hermetically sealed packages has become a crucial question in the semiconductor industry. Thermal transient testing, a well known technique for thermal characterization of IC packages can be a suitable method for detecting hermeticity failures in packaged semiconductor and MEMS devices. In the paper this measuring technique is evaluated. Experiments were done on different measurement setups at different environment temperature and RH levels. Based on the results, a new method for package hermeticity testing is proposed. View full abstract»

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  • Design and fabrication of acoustic wave actuated microgenerator for portable electronic devices

    Publication Year: 2008 , Page(s): 28 - 33
    Cited by:  Papers (3)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (5071 KB) |  | HTML iconHTML  

    An acoustic wave actuated microgenerator for power system applications in mobile phone was design, fabricated, and characterized. We used the acoustic wave of human voices or speakerphone by way of an electromagnetic transducer to produce electrical power for charging or to run a portable electronic device. The proposed microgenerator is composed of a planar coil, a suspension plate with supporting beams and a permanent magnet. In this paper, the dynamic response of the suspension structure and the variation of the induced magnetic flux were characterized by using commercial finite element analysis and Ansoft Maxwell EM3D software, respectively. The electroplating nickel and silicon bulk micromachining techniques were used to fabricate the suspension plate and planar coil, and by integrating a permanent magnet as well as wafer to wafer adhesion bonding to accomplish the microgenerator assembly. The experimental results shown the typical microgenerator with a planar dimension of 3 mm times 3 mm, the maximum induce-voltage 0.24 mV was generated at the driving frequency of 470 Hz. The dynamic response of microgenerator can be designed to meet a specific acoustic driving frequency to increase the efficiency of energy harvesting. View full abstract»

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  • Optimization of efficiency and energy density of passive micro fuel cells and galvanic hydrogen generators

    Publication Year: 2008 , Page(s): 34 - 41
    Cited by:  Papers (1)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (5043 KB) |  | HTML iconHTML  

    A PEM micro fuel cell system is described which is based on self-breathing PEM micro fuel cells in the power range between 1 mW and 1 W. Hydrogen is supplied with on-demand hydrogen production with help of a galvanic cell, that produces hydrogen when Zn reacts with water. The system can be used as a battery replacement for low power applications and has the potential to improve the run time of autonomous systems. The efficiency has been investigated as function of fuel cell construction and tested for several load profiles. View full abstract»

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  • A novel piezoelectric microtransformer for autonomous sensors applications

    Publication Year: 2008 , Page(s): 42 - 45
    Cited by:  Papers (1)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (2951 KB) |  | HTML iconHTML  

    This work relates to a novel piezoelectric transformer to be used in an autonomous sensor unit, possibly in conjunction with a RF-MEMS retro-modulator. View full abstract»

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  • Flexible micro thermoelectric generator based on electroplated Bi2+xTe3−x

    Publication Year: 2008 , Page(s): 46 - 48
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (3011 KB) |  | HTML iconHTML  

    We present and discuss the fabrication process and the performance of a flexible micro thermoelectric generator with electroplated Bi2+xTe3-x thermocouples in a SU-8 mold. Demonstrator devices generate 278 muWcm-2 at DeltaTmeas=40 K across the experimental set up. Based on model calculations, a temperature difference of DeltaTG=21.4 K across the generator is assumed. Due to the flexible design and the chosen generator materials, the performance stays high even for curved contact surfaces. The measurement results correlate well with the model based design optimization predictions. View full abstract»

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  • Linear and non linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators

    Publication Year: 2008 , Page(s): 49 - 51
    Cited by:  Papers (1)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (1645 KB) |  | HTML iconHTML  

    In this work, the design, fabrication and characterization of an electromagnetic inertial microgenerator compatible with Si micro-systems technology is presented. The device includes a fixed micromachined coil and a movable magnet mounted on a resonant polymeric structure. The characterization of the fabricated prototypes has allowed to observe the presence of non linear effects that lead to the appearance of hysteretic vibrational phenomenon. These effects are likely related to the mechanical characteristics of the polymeric membrane, and determine an additional dependence of vibration frequency on the excitation amplitude. Under such non linear conditions, power densities up to 40 muW/cm3 are obtained for devices working with low level excitation conditions similar to those present in domestic and office environment. View full abstract»

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  • Design and fabrication of a novel micro electromagnetic actuator

    Publication Year: 2008 , Page(s): 52 - 55
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (3025 KB) |  | HTML iconHTML  

    A novel technique for the fabrication of micro electromagnetic actuators was proposed and a prototype was designed and fabricated in this study. The constituent parts of the designed actuator are comprised of a diaphragm, a micro coil, and a magnet. When an electrical current was applied to the micro coils, the magnetic force between the magnet and the coil was produced and caused the diaphragm to deflect and become the source of actuation. The structure of the actuating device used polyimide as the insulating barrier and electroplated copper as the coils. The diaphragm deflection can be regulated by varying the current passed through the micro coil and hence the actuating effects can be controlled. The results show that the maximum diaphragm deflection within elastic limits is 150 mum, obtained as applying a current of 0.6 A through the micro coil with 100 mum line width. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its plane structure. View full abstract»

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  • A new four states high deflection low actuation voltage electrostatic MEMS switch for RF applications

    Publication Year: 2008 , Page(s): 56 - 59
    Cited by:  Papers (2)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (5435 KB) |  | HTML iconHTML  

    This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4 mum) with low actuation voltage (7,5 V). This design presents also a good contact force and improves the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24 GHz applications, based on this design, has been simulated. View full abstract»

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  • High quality factor silicon cantilever driven by PZT actuator for resonant based mass detection

    Publication Year: 2008 , Page(s): 60 - 65
    Cited by:  Papers (2)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (3158 KB) |  | HTML iconHTML  

    A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) film actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive mass detection. Intrinsic energy dissipation and other negative effects from PZT film were successfully compressed by separating the PZT actuator from the resonant structure. Excellent Q-factor, which is comparable to silicon only cantilever and several times larger than latest reported Q-factor of integrated cantilevers, was successfully obtained under both atmospheric pressure and reduced pressures. For a 30 mum-wide 100 mum-long cantilever, Q-factor was measured as high as 1113 and 7279 under the pressure of 101.2 KPa and 35 Pa, respectively. Moreover, it was found that high mode vibration can be achieved for the pursuit of great Q-factor. However, support loss became significant because of the increase of PZT actuatorpsilas vibration amplitude. Therefore, an optimized structure using node-point actuation was discussed and suggested herein. View full abstract»

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  • Low actuation voltage totally free flexible RF MEMS switch with antistiction system

    Publication Year: 2008 , Page(s): 66 - 70
    Cited by:  Papers (3)  |  Patents (1)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (4233 KB) |  | HTML iconHTML  

    This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5 V) and avoid stiction. First, the structure described with principal design issues, the corresponding antistiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF measurements are presented and preliminary experimental protocol and results of anti-stiction validation is detailed. Resulting RF performances are -30 dB of isolation and -0.45 B of insertion loss at 10 GHz. View full abstract»

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  • On-chip hotplate for temperature control of CMOS SAW resonators

    Publication Year: 2008 , Page(s): 71 - 76
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (5582 KB) |  | HTML iconHTML  

    Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistors as a method of temperature control for CMOS SAW resonators. The design employs the oven control temperature stabilization scheme where the devicepsilas temperature is elevated to higher than Tmax to maintain constant device temperature. The efficiency of the polysilicon resistor as a heating element was verified through a 1-D partial differential equation model, 3-D CoventorWarereg finite element simulations and measurements using Compixreg thermal camera. To verify that the on-chip hotplate is effective as a temperature control method, both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of -97.2 ppm/degC has been reduced to -23.19 ppm/degC when heated to 56degC. View full abstract»

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  • Modelling MEMS structures using Cosserat theory

    Publication Year: 2008 , Page(s): 77 - 79
    Cited by:  Papers (1)
    Save to Project icon | Click to expandQuick Abstract | PDF file iconPDF (1639 KB) |  | HTML iconHTML  

    Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems. View full abstract»

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