Microelectronic Test Structures, 1997. ICMTS 1997. Proceedings. IEEE International Conference on
Date 17-20 March 1997
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Displaying Results 1 - 25 of 47
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1997 IEEE International Conference on Microelectronic Test Structures Proceedings
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PDF (350 KB)
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1997 ICMTS Author Index
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PDF (109 KB)
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Integrated test circuit to measure polarization characteristics of ferroelectric capacitors for development of mega-bit scale FeRAM
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PDF (340 KB)
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Determination of defect size distributions based on electrical measurements at a novel harp test structure
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PDF (940 KB)
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Design and characterization of SiGe TFT devices and process using Stanford's test chip design environment
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PDF (472 KB)
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An on-chip, interconnect capacitance characterization method with sub-femto-farad resolution
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PDF (280 KB)
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Test structure and methodology for experimental extraction of threshold voltage shifts due to quantum mechanical effects in MOS inversion layers
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PDF (288 KB)
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Test structures for hillock growth, via filling and for measuring the quality of thin films
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PDF (892 KB)
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Test structures for the evaluation of air-bridge interconnection in GaAs IC's fabrication process
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PDF (360 KB)
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Electrical linewidth test structures fabricated in mono-crystalline films for reference-material applications
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PDF (1000 KB)
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Optical signal injection for high-speed wafer level function test of integrated circuits
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PDF (700 KB)
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A proposal for modeling substrate coupling in Si-MMICs and its experimental verification up to 40 GHz
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PDF (432 KB)
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Measurement and characterization of multi-layered interconnect capacitance for deep submicron VLSI technology
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PDF (368 KB)
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A compact monitoring circuit for real-time on-chip diagnosis of hot-carrier induced degradation
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PDF (540 KB)
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Reference-length shortening by Kelvin voltage taps in linewidth test structures replicated in monocrystalline silicon films
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PDF (496 KB)
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A new technique and a test structure for evaluating Vth distribution of flash memory cells
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PDF (288 KB)
