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Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on

Date 16-19 Jan. 2007

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  • Index of authors

    Publication Year: 2007 , Page(s): nil1 - nil9
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  • Conference organizers

    Publication Year: 2007 , Page(s): nil10 - nil12
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  • Technical Program Committee

    Publication Year: 2007 , Page(s): nil13
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  • Acknowledgement of Financial Sponsors

    Publication Year: 2007 , Page(s): nil14
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  • Information on IEEE-NEMS Plenary Seakers

    Publication Year: 2007 , Page(s): nil15
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  • Plenary Speech: Micro- and Nano-Technologies for Automotive Research

    Publication Year: 2007 , Page(s): nil16
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    In this talk, current and future research directions for micro- and nano-technologies applicable to the automotive sensor market will be presented. There exists an opportunity for new research to provide new micro- and nano-technologies that in the short run may not yet compete with the existing automotive sensor technologies, but in the long run are likely to surpass them. Historically, automotive sensor technology has been transitioning through three phases, from 1) early phases in which simple driver information is generated, to 2) computer-in-the-loop control systems to 3) complete driving experience mode selection. This existing technology is in phase 3, and for this phase to be successfully completed, new sensors that have higher resolution, greater bandwidth and lower cost must be developed. The new micro- and nano-technologies will provide that solution. A number of micro- and nano-sensors, currently under development, will be described and reviewed. These include 1) resonant micro strain sensors to determine the smallest deflections of even the most rigid of metal automotive parts, 2) micro sensors that show promise of measuring temperature, acceleration, pressure and strain inside the automobile engine combustion chamber, 3) nanowire and nanotube sensors made using a new, room temperature fabrication method that allows the nanowires and nanotubes to be fabricated directly on CMOS chips and 4) miniaturized, low-cost, micro RF systems to detect the presence of pedestrians in the path of the vehicle. These sensors, and others, promise to revolutionize the automotive sensor market. View full abstract»

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  • Plenary Speech: Nano-photonics

    Publication Year: 2007 , Page(s): nil17
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  • Plenary Speech: Spin Excitation Spectroscopy with the STM

    Publication Year: 2007 , Page(s): nil18
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    We have extended the spectroscopic abilities of the scanning tunneling microscope to include the measurement of spin-excitation spectra. Utilizing spin-excitation spectroscopy as our primary tool, we are now capable of extracting exchange coupling energies, anisotropy energies, and information on the spin configuration of nanometer-scale structures. What we learn from these experiments will hopefully allow us to engineer the "energy landscape" of a system of spins in order to achieve nanometer-scale binary logic circuits that operate using only the spin degree of freedom. View full abstract»

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  • Plenary Speech: Nanotechnology: Practical Systems and Integration with MEMS

    Publication Year: 2007 , Page(s): nil19
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    There are strong research programs in nanotechnology related to chemical sensors, electromechanical devices, actuators, biosensors, and other nanodevices in leading laboratories across the world. In many cases, practical systems demand seamless integration of the nanodevice with higher order structures, for example, MEMS. Examples of this using carbon nanotube based chemical and biosensors will be presented. Opportunities using inorganic nanowires in the above applications will also be highlighted. View full abstract»

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  • Plenary Speech: 3D Nano-photonics

    Publication Year: 2007 , Page(s): nil20
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  • Information on IEEE-NEMS Invited Seakers

    Publication Year: 2007 , Page(s): nil21 - nil22
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  • Special Invited Lectures: Surface NanoBiotechnology

    Publication Year: 2007 , Page(s): nil23
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    With the intention to develop alternative approaches to lab on a chip for organisation and transport of biomolecules on surfaces several unique concepts have been developed. Electro contact printing (1) is a method with the potential to site specifically organise molecules at tenth of nanometers. This method has also been used for segmented derivatisation of micron sized magnetic beads. Controlled transport of magnetic beads on surfaces is a new technological platform (2) with a great potential for Surface Nanobiotechnology as macromolecule and cell transporter, cell and macromolecule sorter and nanosensor for studies of friction and quantification of macromolecules. (1) Nanoscale Site-Specific Immobilisation of Proteins through Electroactivated Disulphide Exchange Nanoletters (2003) Vol.3, No.6, pp. 779-781 (2) Programmable Motion of Magnetic Beads using Thin Film Magnetic Elements Advanced Materials, (2005) 17, 1730-1736. View full abstract»

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  • Special Invited Lecture: Integrated MEMS Sensors

    Publication Year: 2007 , Page(s): nil24
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    Monolithic ISFET (ion-sensitive field-effect transistor) pH sensor and microelectrode amperometric immunosensor based on the micro fabrication technology have been studied. The Monolithic ISFET sensor, including the differential ISFET/REFET sensing device and the signal-processing circuit integrated on a single chip, was fabricated by standard CMOS and MEMS technology. Polypyrrole were electropolymerized at different voltage on ISFET gate and REFET gate to form ion-sensitive membrane and ion-insensitive membrane. Micro and compatible amperometric immunosensor, composed of micro electrodes and micro reaction pools, was developed by MEMS technology. Bireceptor molecules were immobilized on the sensitive area of the electrode surface by the technology of self-assembled monolayers. The immunosensor was characterized by detection of immunoglobulin G and ¿-fetoprotein. Both kinds of the sensors show attractive advantages, such as miniaturization, compatibility with CMOS techniques, easy to be designed into micro array and enables relatively rapid, reliable and inexpensive field-analysis. View full abstract»

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  • Special Invited Lecture: Improving the Performance of MEMS Actuators Using Feedback Control

    Publication Year: 2007 , Page(s): nil25
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    As MEMS actuators are used for increasingly challenging applications, greater reliability, speed, and performance accuracy are needed. Increasing demands are reaching a point where mechanical design improvements alone cannot provide further improvements in performance. Alternative approaches, such as open-loop or closed-loop control driving strategies, must be used instead. The presence of system vibratory modes has introduced additional challenges for controller design. This talk will explore applications where closed-loop feedback control strategies can be successfully used to improve MEMS actuator performance. The talk focuses on electrostatic MEMS actuators. Experimental results are provided to show the effectiveness of the feedback control design methods. We design a light intensity control system for a MEMS variable optical attenuator (VOA) that speeds up the response. We design a controller for lateral instability in electrostatic actuators that allows the use of the full range of actuator motion. We design a controller that stabilizes electrostatic microactuators and avoids pull-in, allowing the effective utilization of the entire capacitive gap. We compare the performance of open-loop and closed-loop control strategies, and present experimental results to address the comparative issues involved. View full abstract»

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  • Special Invited Lecture: Medical Nanotechnology for Preserving Cardiovascular Health and Treating Cardiovascular Diseases

    Publication Year: 2007 , Page(s): nil26
    Cited by:  Papers (1)
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    One of the most exciting perspectives in the field of nanomedicine is the potential application of novel nanotechnogology to dramatically improve medical science and practice in the 21st century, including prevention, diagnoses, and treatment of diseases in humans. Maintaining a healthy cardiovascular system and treating cardiovascular diseases, the number one killer among all other diseases, are undoubtedly important areas for medical nanotechnology to be developed and applied. In this lecture, topics related to the application of nanotechnology in the understanding of molecular mechanisms responsible for certain cardiovascular diseases and how nanotechnology may be used for advancing the diagnose and treatment of these diseases will be discussed. Specifically, our collaborative studies in understanding cellular and molecular dynamics using a robotic atomic force microscopic system and a biosensor array will be presented in details. Also, snapshots of significant advancements in nanotechnology for diagnosis and therapy and how these key advancements may be used for tackling challenges in prevention and treatment of cardiovascular diseases in the 21st century will be discussed. Given that many diseases have their roots at the nanoscale and are best understood as a malfunctioning of biological nanomachines, the prospects of these unique nano-sensors or -actuators in basic biomedical research or in clinical practice are beyond our imagination. Our laboratory and our collaborative research team are working diligently to explore the full biomedical potential of nanotechnology, hoping to eventually improve human health and life. View full abstract»

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  • Special Invited Lecture: Implant Micro/Nano Systems for Bio-Medical Applications

    Publication Year: 2007 , Page(s): nil27
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    The application of "Implant Micro/Nano systems" in life sciences and Medical Engineering may have diagnostic monitoring, therapeutic treatment, and two way control functions. This paper will summarize the implant system research and applications since the early period (1960-1980). Selected examples will be used to explain the implant system concepts and demonstrative results of implant telemetry systems. With the advances of Micro/Nano technologies in MEMS/NEMS, the bright outlook and direction of advances in future implant systems will be suggested. The special requirements, design considerations and the bottleneck problems of implant systems, as well as possible solutions to these problems will be discussed. Suggestions are made on research topics required in theory, technology, device design and system applications to realize the potential contributions of implant system to life sciences and medical care. View full abstract»

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  • Special Invited Lecture: Thermoelectric Energy Conversion in Nanostructures

    Publication Year: 2007 , Page(s): nil28
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    Thermoelectric effects enable direct energy conversion between heat and electricity. Various size effects can be explored to increase the thermoelectric performance of nanostructures compared to bulk. Boundary scattering reduces the phonon thermal conductivity, and quantum confinement and interface energy filtering can improve the electronic power factor. Theoretical and experimental results are described for thin films, nanowires, and nanocomposites. View full abstract»

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  • Special Invited Lectures: Microfabrication and Nanostructure Processing of Advanced Biological Systems

    Publication Year: 2007 , Page(s): nil29
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    Microelectromechanical systems (MEMS) can be combined with nanostructured materials in the design of multifunctional devices. MEMS provide for the ease of microfluidics control, and allows for the full integration of mechanical and electrical components at the macroscopic level through a top-down approach. In contrast, nanostructured materials enable the bottom-up synthesis and assembly of molecular, supramolecular and nanometer-scale structures with controlled surface functionalization. By bringing together MEMS and nanostructured materials, we can achieve (i) automated preparation and manipulation of biological samples, (ii) high-throughput drug screening, (iii) ultrasensitive biomolecular sensors and medical diagnostics, (iv) complex bioreactors for cell and tissue engineering, and (v) biomimetic artificial organs and implants. This presentation describes the exciting possibilities of engineering advanced biological systems by combining microfabrication of devices and nanostructure processing of materials. View full abstract»

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  • Special Invited Lecture: Integration of Nanostructures with Microsystems

    Publication Year: 2007 , Page(s): nil30
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    In the past decades, the application of microelectronic and micro/nanotechnologies to the fabrication of solid-state devices stimulated emerging research in micro/nano sensors and actuators. The versatility of semiconductor and micro/nano materials promise new systems with better capabilities and improved performance-to-cost ratio over those of conventionally machined devices. In recent development of nano devices, one key bottleneck has been the integration of nanostructures with Microsystems. This talk will discuss state-of-art integration methodologies of nanostructures with Microsystems using past and on-going efforts. These research results cover various issues in the synthesis and assembly of one-dimensional nanostructures and heterogeneous integration using MEMS as the building blocks including synthesis and assembly of carbon nanotubes, silicon nanowires and zinc oxide nanowires. One common innovation in these projects is the use of localized heating and synthesis such that nanostructures can be grown in a room temperature chamber. Synthesis, directional growth and self-assembly of one-dimensional nanostructures with Microsystems have been demonstrated by means of localized resistive heating, inductive heating: and local electrical field directed, in-situ monitored self-assembly processes. Current research programs will be briefed in the following areas: integrated nanoelectromechanical systems using nanotubes, nanowires and electrospun nanofibers. This talk will conclude with discussions on future research directions. View full abstract»

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  • IEEE-NEMS Commercialization Workshop Speaker List

    Publication Year: 2007 , Page(s): nil31 - nil32
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  • Workshop Speech: Commercialization of MEMS/NEMS in Tohoku University Open Collaboration

    Publication Year: 2007 , Page(s): nil33
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    MEMS (Micro Electro Mechanical Systems) have been fabricated using advanced micromachining based on an extended semiconductor microfabrication. Sophisticated MEMS device used as a high performance rotating gyroscope for navigation control systems was developed. A 1.5 mm diameter silicon ring rotor is electrostatically levitated and rotated at 75,000rpm using high speed digital signal control. Two-axes rotation and three-axes acceleration are detected simultaneously with high precision. Small size packaged MEMS devices such as integrated capacitive pressure sensor, diaphragm vacuum sensor and MEMS relay for LSI tester have been fabricated using a wafer level packaging using a glass with electrical feedthroughs. The MEMS relay performs high frequency response up to 20 GHz and high reliability owing to the hermetic sealing. Active catheters, fine blood pressure sensors used in a blood vessel and endoscope with laser therapy function have been developed for minimal invasive medicine using MEMS based assembly. As NEMS (Nano Electro Mechanical Systems) which include nano structure, arrayed systems as multiprobe data storage and massively parallel electron beam lithography system have been developed using a glass with high density electrical feedthroughs. Monolithic XYZ-stage has been also developed for the arrayed systems. Highly sensitive cantilever resonator and micro probes have been also developed as the NEMS. View full abstract»

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  • Workshop Speech: Role of University Research for Open Innovations in MNT

    Publication Year: 2007 , Page(s): nil34
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    The role of University in MNT has been becoming more and more essential since the Micro Nano Technology (MNT) requires not only innovative seeds to open up a new application fields but also both well-qualified persons in MNT who lead this field. To meet these requirements, interdisciplinary and international collaboration and cooperation in education and research is crucially important. Firstly, part of related activities related to MNT in Kyoto University are introduced, such as the education program in MNT, the organization of newly established Micro Engineering Department, and research organization of Research Institute of Nano Science & Technology which is the lateral organization of several departments and colleges on nanotechnology. Secondly, two research topics in MNT, nano-scale material mechanical property characterization and nano-components assembly on MEMS which are pursued at Micro Nano System Laboratory are introduced as the tentative themes for further international collaboration and cooperation. View full abstract»

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  • Workshop Speech: Case Study: The Commercialization of Multi-Axis Inertial sensor Technology

    Publication Year: 2007 , Page(s): nil35
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    The increasing commercial use of MEMS technology has accelerated over the past few years and now a number of devices are finding their way into large volume consumer electronics applications. One of the most promising MEMS device markets include multi-axis inertial sensors, including 3-axis accelerometers, 2, 3-axis gyros 5, 6-axis motion sensors integrating both accelerometers and gyros. Numerous applications will utilize such devices at an increasing rate, as market demand is expected to increase at a quickened pace over the next several years. Mr. Ross will showcase a leading start-up company's strategy to utilize the industry's largest related patent portfolio of market-proven technology for MEMS multi-axis inertial sensors. He will outline how the technology is currently being commercialized and expectations or the near and long-term future. View full abstract»

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  • Workshop Speech: Seawater Desalination by RO membrane

    Publication Year: 2007 , Page(s): nil36
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    Among desalination technologies available today, RO is regarded as the most economical desalination process for wide range of water salinity. The development of crosslinked aromatic polyamide composite membrane in 1980's was a significant affair, and many types of membranes, such as low-pressure types for brackish water desalination and high-pressure types for seawater desalination, have been developed after that. The permeate flow rate and water quality of RO membranes have been greatly improved, especially high pressure type SWRO membranes have enabled us to carry out the 60% of high recovery rate operation and low cost seawater desalination, which is called Brine Conversion Two Stage Seawater Desalination System and they have been already running in the world. Recently the development of high-performance SWRO membrane is required since the regulation for water quality is getting severer and severer. In particular, boron removal is one of the most important issues to be conquered in seawater desalination. WHO has established severe guideline value in the boron concentration in drinking water because boron is known to kill citrus trees and cause infertility. Boron exists as boric acid in seawater, and its concentration is 4 to 7 ppm. Boric acid is a very small molecule, which has about 0.4 nm in diameter because it is not ionized and not hydrated in a neutral region. So boron is the typical substance, which is difficult to be removed by RO membrane. View full abstract»

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  • Workshop: "MEMS" Commercialization and Future Vision

    Publication Year: 2007 , Page(s): nil37
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    OLYMPUS is promoting MEMS business incubation for future MEMS Technology as "MEMS Global Alliances". This presentation gives you some new hints for future vision of MEMS business. 1. Enlargement of its market applying MEMS must be extreme cost down. 2. Replacement to MEMS from existing electronics device must be strict function. 3. Explore of new market commercializing MEMS must be innovated change mind. View full abstract»

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