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2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Date 18-21 Jan. 2006

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  • Index of authors

    Publication Year: 2006, Page(s):nil1 - nil12
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  • Conference organizers

    Publication Year: 2006, Page(s):nil13 - nil14
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  • Technical Program Committee

    Publication Year: 2006, Page(s): nil15
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  • Acknowledgement of Financial Sponsors

    Publication Year: 2006, Page(s): nil16
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  • Keynote and Special Invited Speeches

    Publication Year: 2006, Page(s): nil17
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (606 KB) | HTML iconHTML

    Provides an abstract for each of the keynote presentations and a brief professional biography of each presenter. The complete presentations were not made available for publication as part of the conference proceedings. View full abstract»

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  • Notes on Conference CD-ROM and Hardcopy Publications

    Publication Year: 2006, Page(s):nil18 - nil19
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  • Notes on IEEE-NEMS Banquet Venue

    Publication Year: 2006, Page(s):nil20 - nil21
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  • Technical Program Overview

    Publication Year: 2006
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  • Table of contents

    Publication Year: 2006, Page(s):nil25 - nil40
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  • [Front cover]

    Publication Year: 2006, Page(s): C1
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  • Welcome message

    Publication Year: 2006, Page(s): nil41
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  • A CMOS Biochip for Electrical Detection of DNA with an Embedded Current Amplifier Circuit

    Publication Year: 2006, Page(s):1 - 5
    Cited by:  Patents (1)
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (5156 KB) | HTML iconHTML

    This paper presents a CMOS biochip for DNA detection with an embedded current amplifier circuit by using self-assembly multilayer gold nanoparticles (AuNPs). The biochip is fabricated by a TSMC 0.35 mum 2P4M standard CMOS process and post-CMOS micromachining processes. On each measuring spot, there is a pair of electrodes with a gap distance of 350 nm. Through a self-assembly process between suspe... View full abstract»

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  • A Hybrid Nano-Imprinting Lithography Based on Infrared Pulsed Laser Heating

    Publication Year: 2006, Page(s):6 - 10
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (5159 KB) | HTML iconHTML

    In this paper we present a novel method of nano-imprinting which adopts important features of conventional nano-imprinting lithography (NIL) and the newly developed laser-assisted direct imprinting (LADI) method. It utilizes an Nd-YAG pulsed laser of wavelength 1064 nm which can easily penetrate and also heat up a silicon mold which is pressed against a resist layer deposited on a substrate. The f... View full abstract»

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  • A New Method to Prepare Ordered Silver Nanoparticle Arrays

    Publication Year: 2006, Page(s):11 - 14
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (4066 KB) | HTML iconHTML

    Poly (styrene-b-butadiene-b-styrene) (SBS) triblock copolymer templates which present in-plane cylinder pattern have been prepared by solvent-induced order-disorder phase transition method. Then silver clusters have been deposited onto the SBS copolymer templates by low energy clusters beam deposition (LECBD) apparatus. The characterization of samples by AFM with tapping-mode has shown that silver... View full abstract»

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  • Nanojet formation by heating PbO coated Pb clusters

    Publication Year: 2006, Page(s):15 - 17
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (2857 KB) | HTML iconHTML

    Nanojet means that the liquid is forced to pass through the nozzle with the nanosize diameter, we report here that nanojet was formed for the first time in lab by heating the PbO coated Pb clusters. In this experiment, the coated clusters are heated to more than 200 C and it was found that the inner Pb core melted and ran out from the cracked outer shell with a 200-nm-long(as long) trail. The in s... View full abstract»

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  • Self-testable Pressure Sensors Based on Phase Change

    Publication Year: 2006, Page(s):18 - 20
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (2927 KB) | HTML iconHTML

    Novel self-testable pressure sensors based on phase change have been fabricated. The sensors were built in a glass-silicon-glass sandwich structure. Water acted as the phase change material (PCM) was injected into the cavity of the pressure sensor. Applying voltage to the heating resistor, the PCM boiled. The vapor produced by phase change can produce high enough self-testable output. Therefore, t... View full abstract»

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  • The Impact of Flare, Polarized Light and Aberration on CD Uniformity of Butting Pattern and CD Control

    Publication Year: 2006, Page(s):21 - 24
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (4923 KB) | HTML iconHTML

    The variation of the image quality and critical dimension (CD) uniformity due to the flare, geometrical aberrations and polarized light is studied in order to understand the implication on CD errors control. Some of the surprising phenomena, which occurring at high numerical aperture (NA), are studied with 2-dimension (2D) mask by calculating the latent images of 65 nm butting pattern. When the fl... View full abstract»

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  • The Molecular Dynamics Simulation of Monocrystal Carbon, Silicon and Germanium Thermal Conductivity

    Publication Year: 2006, Page(s):25 - 29
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (4231 KB) | HTML iconHTML

    In this paper the thermal conductivities of monocrystal carbon, silicon, and germanium nanometer thin film are simulated respectively using non-equilibrium molecular dynamics (NEMD) method and corresponding Tersoff potential energy function. The simulation results indicate that the thermal conductivities of those nanometer thin films are obviously lower than the corresponding thermal conductivitie... View full abstract»

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  • Microactuator Based on EVOH-g-SO3H IPMC

    Publication Year: 2006, Page(s):30 - 33
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (4777 KB) | HTML iconHTML

    A new ionomer of sulfonated ethylene vinyl alcohol copolymer, EVOH-g-SO3H was synthesized and the ionic polymer metal composite (IPMC) based on EVOH-g-SO3H polymer has been produced through electroless deposition of platinum on the bare polymer membranes. The actuation performance for IPMC actuator was tested in order to set up a relationship between the structure and the beh... View full abstract»

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  • Improved Calibration Method for Lateral Force of the Cantilever Deflection Force Sensor in Atomic Force Microscope

    Publication Year: 2006, Page(s):34 - 37
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (4110 KB) | HTML iconHTML

    Quantitative friction measurement of nano materials in atomic force microscope (AFM) requires accurate calibration method for the lateral force. An improved calibration method for the lateral force of the cantilever in AFM is presented. The calibration factor derived from the original method increased with the applied normal load, which indicates that separate calibration should be required for ev... View full abstract»

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  • A Micro Amperometric Immunosensor Based on Protein A/Gold nanoparticles/Self-assembled Monolayer-Modified Gold Electrode

    Publication Year: 2006, Page(s):38 - 41
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (4349 KB) | HTML iconHTML

    A novel amperometric immunosensor fabricated by microelectromechanical systems (MEMS) technology with a novel modified procedure for immobilization of antibody on gold electrode has been developed. Based on MEMS technology, immunosensor with a three-microelectrode system integrated with two SU-8 micro pools was fabricated. Employing self-assembled monolayers technique, the working electrode was mo... View full abstract»

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  • Nonafiber Membrane of EVOH-Based Ionomer by Electrospinning

    Publication Year: 2006, Page(s):42 - 46
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (6476 KB) | HTML iconHTML

    Electrospinning is a straightforward and effective technique to produce nanofiber nonwovens. In this paper, a comb ionomer of poly(ethylene covinyl alcohol) end-capped with sulfonic acid (EVOH-g-SO 3H) was synthesized by two-step synthesis process and electrospun into nonwoven membranes. The effect of processing parameters on the fibrous and beads morphology was investigated by scanning... View full abstract»

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  • A New Packaging Method for Pressure Sensors by PDMS MEMS Technology

    Publication Year: 2006, Page(s):47 - 51
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (3985 KB) | HTML iconHTML

    This paper proposes a novel wafer-level packaging (WLP) method at room temperature for piezoresistive pressure sensors. We use a polydimethylsiloxane (PDMS) sheet as a candidate for replacing a Pyrex glass wafer, to seal the backside V-grooved chambers of the pressure sensor chips. PDMS is a well-known material in MEMS technology recently. It is not only cheap but also has a merit of a simple proc... View full abstract»

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  • Bandwidth Improvement of Fast Steering Mirror by FEDA

    Publication Year: 2006, Page(s):52 - 55
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (2839 KB) | HTML iconHTML

    The bandwidth of fast steering mirror (FSM) is about several tens of hertz which is related to Tylar frequency of atmospheric turbulence, and the bandwidth of deformable mirror ranges from several tens to hundreds hertz relates to Greenwood frequency of atmospheric turbulence. According to practical experience, the ratio of fast steering mirror and deformable mirror should be from one is to five t... View full abstract»

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  • Characterization of Mechanical Properties of PZT Thin Film by Nanoindentation

    Publication Year: 2006, Page(s):56 - 60
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (4283 KB) | HTML iconHTML

    The mechanical properties of sol-gel-deposited lead zirconate titanate (PZT) thin films have been studied using nanoindentation method. This permitted a determination that the sol-gel derived PZT (53/47) films display an elastic modulus, approximately 123 GPa, much higher than that of bulk PZT ~ 68 GPa. The thin films exhibit hardness between 7 and 8 GPa, slightly lower than that of bulk PZT ~ 9 G... View full abstract»

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