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Active Drives for Microengineering Applications, IEE Colloquium on

Date 26 Apr 1995

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Displaying Results 1 - 8 of 8
  • Design and construction of a micromechanical optical actuator

    Publication Year: 1995, Page(s):7/1 - 7/3
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (240 KB)

    Optically powered fluid actuators are under development for use in `control-by-light' systems including one based on photothermal effects inside a closed cell. The miniaturisation of the converter has been shown to improve the speed of operation of this device substantially, with time constants of the order of tens of milliseconds. Further integration of the various device components in silicon al... View full abstract»

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  • Passivation for three-dimensional actuation microstructures using ECR-CVD

    Publication Year: 1995, Page(s):8/1 - 8/3
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (148 KB)

    Xaar actuators have been fabricated using PZT as a substrate with aspect ratios of the order of 6:1. The fabrication of a passivation layer of suitable quality, to ensure adequate device lifetime, requires a significant improvement over standard PECVD depositions of inorganic coatings. In this paper Electron Cyclotron Resonance Chemical Vapour Deposition (ECR-CVD) has been used for the deposition ... View full abstract»

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  • Micro electromagnetic navigational systems

    Publication Year: 1995, Page(s):9/1 - 9/2
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (140 KB)

    The research is investigating miniaturised integrated navigation systems based around two sub-systems, a miniature flux-gate magnetometer compass and a miniature inertial gyroscope. Through miniaturisation and integration with decoding and drive electronics, both these devices have the potential of low cost and open a wide range of applications which include personal and in-vehicle navigation, and... View full abstract»

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  • Piezomagnetic control of machines

    Publication Year: 1995, Page(s):5/1 - 5/3
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (192 KB)

    Modern magnetic materials, particularly in thin film or multilayer form, offer piezomagnetic properties that have the potential to compete with piezoelectric materials in devices. This paper offers an overview of these new materials and their properties, gives a discussion of the potential benefits to be derived from using them, and gives an illustrative example of application in a device View full abstract»

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  • Arterial plaque removal with an electrostatic microactuator

    Publication Year: 1995, Page(s):6/1 - 6/3
    Cited by:  Papers (3)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (220 KB)

    The therapy of atherosclerosis, a type of cardiovascular disease, has, in recent years, involved minimally invasive treatment (with one of several types of interventional catheter) of the arterial plaque found in diseased arteries. The advent of microtechnology based on potentially simple fabrication techniques invites the possibility of new approaches which could reduce damage caused by the prese... View full abstract»

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  • A comparison of electrostatic and magnetic actuation for micromechanical systems

    Publication Year: 1995
    Cited by:  Papers (1)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (52 KB)

    Summary form only given. Our work on integrated micromachined accelerometers has shown that for optimum performance it is necessary to run the accelerometers in a closed loop configuration. The use of such a closed loop system requires the incorporation of some form of actuator mechanism into the silicon micromachined device. In this paper we compare electrostatic and electromagnetic actuation whi... View full abstract»

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  • Piezoelectric films in silicon-based microactuation structures

    Publication Year: 1995, Page(s):2/1 - 2/3
    Cited by:  Papers (1)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (228 KB)

    We have established a process for the deposition of multi-micron piezoelectric films which is compatible with fabrication of micro-mechanical actuator structures, and have fabricated such actuators, and demonstrated their operation. While some of these accomplishments have been reported by other groups, we know of none that have achieved all of them in an integrated fabrication process. However, c... View full abstract»

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  • Actuation mechanisms for microengineering-principles and practice

    Publication Year: 1995, Page(s):1/1 - 1/3
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (188 KB)

    In this paper we review many of the methods of actuation used in microengineered devices: their principles, materials and advantages View full abstract»

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