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Iee colloquium on application of plasma technology to surface processing - recent developments in modelling and diagnostics for process control and optimization

30 Mar 1995

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  • IEE Colloquium on `Applications of Plasma Technology to Surface Processing - Recent Developments in Modelling and Diagnostics for Process Control and Optimization' (Digest No.1995/149)

    Publication Year: 1995
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (12 KB)

    The following topics were dealt with: plasma modelling; afterglow plasmas; intense plasma source discharges; plasma CVD modelling and characterization; glow discharge modelling; RF reactor control diagnostics; dusty plasmas View full abstract»

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  • Modelling of intense plasma source discharges in one and two dimensions

    Publication Year: 1995
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (24 KB)

    As part of the research programme to develop intense ion sources for fusion and defence applications, codes have been developed to explain the behaviour of hydrogen plasmas in magnetic multipole discharges. These discharges contain considerable plasma chemistry effects relating to formation re-vibrational and excited molecular states together with negative ion formation and coulomb scattering. The... View full abstract»

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  • General introduction to the modelling of real plasmas. I

    Publication Year: 1995, Page(s):1/1 - 1/3
    Cited by:  Papers (3)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (184 KB)

    Results obtained using the above simulation techniques have been very successful in describing the initial stages of plasma development. Further work is needed to improve the accuracy and stability of the integration techniques and Yousfi (1994), for example, has recently described how to apply finite element methods to the solution of the continuity equations. Although only applied to the one-dim... View full abstract»

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  • Plasma diagnostics for monitoring and control

    Publication Year: 1995, Page(s):8/1 - 8/3
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (100 KB)

    As part of manufacturing optimisation, there is a need for a suite of diagnostics able to monitor relevant plasma and surface parameters working within a framework capable of making intelligent deductions and directing appropriate actions. This report concerns the use of an artificial intelligence (AI) approach to plasma process control using a number of plasma diagnostics in situ surface diagnost... View full abstract»

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  • Gas phase and surface modelling of diamond-like carbon deposition reactors

    Publication Year: 1995, Page(s):5/1 - 5/3
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (76 KB)

    Among the methods used to prepare diamond-like carbon films, the deposition from rf glow discharges in hydrocarbon gases is the most common. Carbon deposits obtained by this technique vary from soft to hard, from highly resistive to conducting and from almost transparent to brown-yellow, depending on the process parameters. A large number of experimental studies has been published correlating the ... View full abstract»

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  • Gas phase and surface modelling of nitriding afterglow plasmas

    Publication Year: 1995, Page(s):3/1 - 3/2
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (72 KB)

    A mathematical model has therefore been developed in order to gain a better understanding of the phenomena concerned, with a view to improving the design of industrial nitriding plant. The approach employed involved the following steps : study of the behaviour of the reactive species in a post-discharge treatment furnace; a sub-model based on the equations of conservation of momentum, mass and hea... View full abstract»

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  • Atmospheric pressure glow discharges. Modelling and experimental data

    Publication Year: 1995, Page(s):7/1 - 7/3
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (168 KB)

    One of the solutions to increase the efficiency of surface treatments and to avoid the drawbacks associated to low-pressure discharges (i.e. very expensive equipment and extensive outgassing of polymer surfaces) is to use glow discharges working at the atmospheric pressure (APGD). Unfortunately stable glow discharges are much more difficult to obtain at high pressure than at low pressure and it is... View full abstract»

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  • Dusty plasmas-a theoretical charge model and industrial applications

    Publication Year: 1995, Page(s):9/1 - 9/3
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (160 KB)

    When dust grains occur in a plasma, they acquire an electric charge and represent another plasma component something like very massive ions with large charges that can vary with time. The electrons and ions are still there, but the dust alters and can even dominate the behaviour of the plasma. In order to understand the behaviour of the dust particles in plasmas one must model the grain charge, an... View full abstract»

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  • Plasma characterisation in PECVD deposition of diamond

    Publication Year: 1995, Page(s):6/1 - 6/3
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (156 KB)

    The focus of the initial work was the determination of the hydrogen atom density in the plasma since H atoms are thought to be of importance in determining the diamond film quality. The film quality was assessed by an in situ measurement of the refractive index of the depositing films. The absolute atomic hydrogen fraction in the plasma was measured using a two photon LIF technique. These measurem... View full abstract»

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