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MEMS Sensors and Actuators, 2006. The Institution of Engineering and Technology Seminar on

Date 28-28 April 2006

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  • The IET Seminar on MEMS Sensors & Actuators

    Publication Year: 2006, Page(s): 0_1
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (74 KB)

    The following topics are dealt with: MEMS sensors; actuiators; fluidics and flow; physical sensors; RF and wireless; actuators; and biochemical sensors. View full abstract»

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  • Blank Page

    Publication Year: 2006, Page(s): 0_2
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (10 KB)

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  • Title Page

    Publication Year: 2006, Page(s): 0_3
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  • Copyright

    Publication Year: 2006, Page(s):0_4 - 0_5
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  • Introduction

    Publication Year: 2006, Page(s): 0_6
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  • Table of Contents

    Publication Year: 2006, Page(s):0_7 - 0_10
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  • Programme

    Publication Year: 2006, Page(s):0_11 - 0_14
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (119 KB)

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  • Keynote Address: Convergence of Technologies in Development of Micro-Electrokinetic Devices for Biomedical Applications

    Publication Year: 2006, Page(s):1 - 22
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (504 KB)

    The article consists of a Powerpoint presentation on development of micro-electrokinetic devices for biomedical applications. The areas discussed include: micro-electro-mechanical systems; bioMEMS technology; biochip; fluidics; lab-on-chip devices; electroosmosis; cell electromanipulation; dielectrophoresis CMOS chip; cell therapy and diagnosis; and cell isolation challenge; etc. etc. View full abstract»

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  • Building EWOD Microfluidic Array Technology on Top of Foundry CMOS

    Publication Year: 2006, Page(s):23 - 30
    Cited by:  Papers (2)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (765 KB)

    This paper discusses the main issues associated with integrating electrode controlled droplet motion using electro wetting on dielectric (EWOD) with IC foundry technology. The motivation behind this approach is based upon the desire to increase the number of control electrodes, which requires the implementation of on-chip line-column microelectronics. Increasing the number of electrodes is attract... View full abstract»

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  • Suspension-Compatible Elastomer-Glass Micropumps Employing a Linear Topology

    Publication Year: 2006, Page(s):31 - 38
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (841 KB)

    We report a simple, high pumping performance, micropump comprising a narrow flow channel with integral flow control structures operated by a single actuator element. Unusually, it does not have a distinct pump chamber. This micropump is termed a 'Linear MTP' (LMTP) as it exploits the microthrottling principle and single actuator operation of MTP devices we have previously reported. Uncharacteristi... View full abstract»

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  • Investigation on Electro-acoustic Characteristics of a MEMS Microfluidic Ultrasonic Separator

    Publication Year: 2006, Page(s):39 - 46
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (760 KB)

    MEMS Microfluidic Ultrasonic Separators are a novel type of micromachined silicon matching layered separation device that separates suspended micro-particles from within a liquid using a standing ultrasonic field. They are widely used in a variety of applications including chemical, bio-medical, and biological engineering. For example, in the biotechnology field, mammalian cells, bacteria, and yea... View full abstract»

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  • Electroactive Polymers for Flow Control

    Publication Year: 2006, Page(s):47 - 54
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (889 KB)

    The design of EAP actuators, in the form of active dimples for flow control, is described. Manufacturing techniques have been adopted from MEMS processing. The final design comprises 10 mm dimples manufactured on 100 mm silicon wafers; the electrodes consist of graphite powder. Initial electromechanical tests have been carried out and experimental data correlate well with theory. The results show ... View full abstract»

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  • Keynote Address: The Dynamics of Degenerate Mode MEMS Sensors

    Publication Year: 2006, Page(s):55 - 68
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (296 KB)

    A collection of slides from author's conference presentation is given. View full abstract»

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  • The principle of a MEMS circular diaphragm mass sensor

    Publication Year: 2006, Page(s):69 - 74
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (327 KB)

    The paper presents the design principles of a degenerate mode resonant mass sensor in which the unloaded sensor takes the form of a cyclically symmetric structure. The simplest structure with these features is a circular diaphragm and its properties are exploited in this paper. Such structures support pairs of independent modes of vibration which share a common natural frequency and these are refe... View full abstract»

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  • Development of a Second Generation Low Cost MEMS Gyroscope: Design for Manufacture

    Publication Year: 2006, Page(s):75 - 82
    Cited by:  Papers (1)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (604 KB)

    The successful development of a MEMS gyroscope, targeted at high volume, low cost applications, requires careful consideration of both the design and the fabrication requirements. It is essential that the design requirements (e.g. dimensional tolerances) are comfortably within the process capabilities in order to maximise yield at each step. This becomes increasingly important as the design become... View full abstract»

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  • Bio-inspired MEMS Resonant Thermal Detector

    Publication Year: 2006, Page(s):83 - 90
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (596 KB)

    There are many examples of creatures in the natural world with the ability to sense thermal radiation including pit vipers and fire-seeking beetles. This work has sought inspiration from sensors in the natural world and has investigated a disruptive MEMS-based technology with the potential to achieve high performance uncooled infra red detection at low cost. The novel transduction is based on indi... View full abstract»

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  • Standard MEMS Sensor Technologies for Harsh Environment

    Publication Year: 2006, Page(s):91 - 96
    Cited by:  Papers (1)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (600 KB)

    Many markets have already successfully introduced MEMS based products in a very large panel of applications. When looking carefully at the market implantation, it is very interesting to see that benefits of this technology go well beyond the obvious size advantage. Size and weight but also performance, power consumption, parallel manufacturing capability and cost or reliability are common argument... View full abstract»

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  • Scent Whisper

    Publication Year: 2006, Page(s):97 - 104
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (689 KB)

    Scent Whisper is a jewellery set integrated with wireless sensor networks that offer social and therapeutic value in a desirable context. The jewellery incorporates sensors and microfluidics to initiate fragrance delivery, depending on the sensor response. A wireless humidity sensor is used to trigger scent output in these proof-of-concept devices. Future devices will use sensors to detect stress ... View full abstract»

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  • Towards a Truly Biomimetic Olfactory Microsystem: An Artificial Olfactory Mucosa

    Publication Year: 2006, Page(s):105 - 112
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (844 KB)

    Today, the capability of the human olfactory system is still, in many ways, superior to that of artificial detection or the so- called electronic nose. Although electronic noses are often compared to their biological counterpart, they neither mimic its complex neural architecture nor achieve its performance in discriminating between complex odours. Recent developments in our understanding of the h... View full abstract»

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  • Direct Adsorption of Chemically Modified Biomolecules Onto Gold: A Rapid Method for Biological Funcationalization of MEMS

    Publication Year: 2006, Page(s):113 - 118
    Cited by:  Patents (2)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (959 KB)

    The present work reports a simple, rapid and versatile strategy for glycoprotein immobilization, based on the targeted functionalization of carbohydrate residues with disulphide "anchors" derivatives able to spontaneously chemisorb onto gold, with no need of surface pre-functionalization. Different glycoproteins as enzymes and antibodies were chemically modified using this "one step" bio-immobiliz... View full abstract»

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  • Planar Waveguide Enzyme Sensor Array for Water Pollution Monitoring

    Publication Year: 2006, Page(s):119 - 126
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (909 KB)

    The proposed sensor is based on SiO2/Si3N4 planar waveguide having a sensing window coated with electro-statically self-assembled film containing pH sensitive organic chromophore molecules and different enzymes: urease, acetyl- and butyryl-cholinesterase. The sensor is capable of registration of enzyme reactions as well as their inhibition by traces of some typical... View full abstract»

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  • Keynote Address: Developments in Cost Effective Packaging Technology for Microsystems Devices

    Publication Year: 2006, Page(s):127 - 146
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (712 KB)

    The article consists of a Powerpoint presentation on packaging technology for microsystems devices. The areas discussed include: microsystems packaging; wafer level packaging; systems in a package; inertial sensors; side airbag sensor; fluidic sensors; microfluidic devices; fibre optic devices; subsystem integration; wafer bonding; flip chip assembly; angular rate sensor; and optical microsystems ... View full abstract»

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  • Design of an Injectable Microsensor to Wirelessly Transmit Signals from the Motor Cortex of the Human Brain

    Publication Year: 2006, Page(s):147 - 154
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (680 KB)

    A design for a wireless microsensor that can be injected into the human brain to transmit motor cortical signals to an external computer is outlined in this paper. The design covers the electronic system, including communications, and a mechanical system for deploying micro-wings that help prevent motion within the brain, and increase the communication potential of the sensor. View full abstract»

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  • Miniaturised Drug Delivery System with Wireless Power Transfer and Communication

    Publication Year: 2006, Page(s):155 - 162
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (1264 KB)

    This paper reports the development of a system designed to deliver drug doses in a controlled manner over an extended time period. Key performance parameters are the physical size, the power consumption and also the ability to perform two way communications to enable the system to be externally controlled and interrogated. The system has also been designed to facilitate wireless power transfer, wh... View full abstract»

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  • Critical Issues in Fabrication of RF MEMS Switches

    Publication Year: 2006, Page(s):163 - 168
    Cited by:  Patents (1)
    IEEE is not the copyright holder of this material | Click to expandAbstract | PDF file iconPDF (387 KB)

    RF MEMS switches have been fabricated. These switches are in the forms of cantilevers and bridges supported by silicon nitride beams. Two critical issues in the fabrication have been identified, which are topography of contact electrodes and stress induced bending of switch beams. Techniques have been developed to produce better planarised substrate and to realise controllable stress induced bendi... View full abstract»

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