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10-nm channel length pentacene transistors

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This paper appears in:
Electron Devices, IEEE Transactions on
Date of Publication: Aug. 2005
Author(s): Lee, J.B.
Electr. Eng. & Comput. Sci. Dept., Univ. of California, Berkeley, CA, USA
Chang, P.C. ;  Liddle, J.A. ;  Subramanian, V.
Volume: 52 , Issue: 8
Page(s): 1874 - 1879
Product Type: Journals & Magazines

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Abstract

Organic thin-film transitors (OTFTs) were fabricated with channel lengths as small as 10 nm and an operating voltage of VDD=-0.3 V using e-beam lithography. For sub-200-nm channel lengths, scaling L downwards resulted in increased on-current, decreased Ion/Ioff ratio, VT-rolloff, and drain-induced barrier lowering. These trends are correlated with device topology, electrostatics, and thin-film morphology. Nanoscale OTFT are interesting both as a means of studying intrinsic electrical properties of organic materials and as a possible route toward increasing on-current in organic devices. This paper sheds light on many of the issues encountered when shrinking organic devices, providing insight into approaches for optimizing nanoscaled OTFT.

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