This paper appears in:
Optical MEMS, 2003 IEEE/LEOS International Conference on
Date of Conference:
18-21 Aug. 2003
Author(s):
Gupta, K.
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Choo, H.
;
Kim, H.
;
Muller, R.S.
Page(s):
171 - 172
Product Type:
Conference Publications
Batch-processed polarization beam splitters (PBS) are built and characterized. PBS are important optical components used to separate the orthogonal TE and TM components of light. The devices are fabricated from thin-film, low-stress silicon nitride membranes and showed excellent performance. By stacking membranes and a triple-layer, PBS produce extinction ratios of 21 and 16 dB for reflected and transmitted light rays, respectively.
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