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Electric charge 3-dimensional profile measurement in dielectrics using acoustic microscope probe head

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5 Author(s)
Xiaokui Qin ; Pohl Inst. of Solid State Phys., Tongji Univ., Shanghai, China ; Suzuki, K. ; Sazaki, M. ; Tanaka, Y.
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In this paper, we report our attempt of measuring the three-dimensional space charge distribution in a PMMA plate, which is irradiated by an electron beam, using an acoustic lens by the pressure wave propagation (PWP) method

Published in:

Conduction and Breakdown in Solid Dielectrics, 1998. ICSD '98. Proceedings of the 1998 IEEE 6th International Conference on

Date of Conference:

22-25 Jun 1998

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