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Impact of layout on the performance of photodiodes in 0.18µm CMOS SOI

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3 Author(s)
Xuebei Yang ; Electr. & Comput. Eng. Dept., Rice Univ., Houston, TX, USA ; Xuyang Lu ; Aydin Babakhani

The impact of layout on the responsivity and bandwidth of photodiodes is studied and summarized. The photodiodes are fabricated in a 0.18μm CMOS SOI process technology. The measurements are performed at wavelengths near 850nm.

Published in:

2013 IEEE Photonics Conference

Date of Conference:

8-12 Sept. 2013