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Pre-develop bake for end point stabilization with photo-BCB polymers

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7 Author(s)
Scheck, D. ; Dow Chem. Co., Research Triangle Park, NC, USA ; Rogers, B. ; Garrou, P. ; Dibbs, M.
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The use of a bake prior to development stabilizes the develop end point of photo-BCB films and removes the time dependence of the develop end point. The elimination of this source of process variability enables the implementation of a develop process in which, for a given film thickness and set of bake conditions, the optimum develop time is a constant, and monitoring of the end point is unnecessary

Published in:

Advanced Packaging Materials, 1998. Proceedings. 1998 4th International Symposium on

Date of Conference:

15-18 Mar 1998

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