Cart (Loading....) | Create Account
Close category search window
 

Pre-develop bake for end point stabilization with photo-BCB polymers

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Scheck, D. ; Dow Chem. Co., Research Triangle Park, NC, USA ; Rogers, B. ; Garrou, P. ; Dibbs, M.
more authors

The use of a bake prior to development stabilizes the develop end point of photo-BCB films and removes the time dependence of the develop end point. The elimination of this source of process variability enables the implementation of a develop process in which, for a given film thickness and set of bake conditions, the optimum develop time is a constant, and monitoring of the end point is unnecessary

Published in:

Advanced Packaging Materials, 1998. Proceedings. 1998 4th International Symposium on

Date of Conference:

15-18 Mar 1998

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.