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Vertical-objective-based ellipsometric microscope for backside illuminated real-time visualization of nm-thick lubricant films

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5 Author(s)
Qingqing Liu ; Dept. of Micro/Nano Syst. Eng., Nagoya Univ., Nagoya, Japan ; Fukuzawa, K. ; Kajihara, Y. ; Zhang, Hedong
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The vertical-objective-based ellipsometric microscope (VEM) is presented which can be used for real-time visualization of nm-thick lubricant films with high lateral resolution. The performance of hard disk drives (HDDs) depends on the dynamics of the nm-thick liquid lubricant films due to decrease of head-disk gap to 2 to 3 nm. The contact or near-contact head disk interface is needed to increase the recording intensity. However, meniscus formation or lubricant pick-up will occur. Therefore, real-time visualization of shearing nm-thick liquid lubricant films plays an important role in the analysis of these phenomena. However, the current VEM can not provide this contact or near-contact situation due to the short working distance (WD) of the high magnification objective lens. In this report, we propose a backside illuminated VEM, whose illumination system and objective lenses are set on the opposite of the sliding probe to solve this problem, and the feasibility of the method is discussed.

Published in:

Micro-NanoMechatronics and Human Science (MHS), 2011 International Symposium on

Date of Conference:

6-9 Nov. 2011