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In view of the characteristics of high precision and good stability in the micro operation field, the flexure hinges micro-gripper actuated by piezoelectric actuators is designed. The mechanical model of the micro-gripper is further established and the dimension is optimized, and finally the micro-gripper is tested by the experiment. The results showed that the travel range of this micro-gripper can reach up to 522 μm, whose amplification ratio can be 21.2060, with the precision less than 5 nm.
Date of Conference: 15-17 April 2011