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Influence of Passivation Layers on Characteristics of a-InGaZnO Thin-Film Transistors

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9 Author(s)
Shou-En Liu ; Electron. & Optoelectron. Res. Labs., Ind. Technol. Res. Inst., Hsinchu, Taiwan ; Ming-Jiue Yu ; Chang-Yu Lin ; Geng-Tai Ho
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We investigated the influence of passivation-layer deposition on the characteristics of a-InGaZnO thin-film transistors (TFTs). The threshold voltage (VT) of the TFTs shifted markedly as a result of the mechanical stress induced by the passivation layers above. By adjusting the deposition parameters during the passivation process, the performance of the TFTs can be modulated. The a-InGaZnO TFTs after dual passivation exhibited good performance with a field-effect mobility of 11.35 cm2/V·s, a threshold voltage of 2.86 V, and an on-off ratio of 108.

Published in:

Electron Device Letters, IEEE  (Volume:32 ,  Issue: 2 )

Date of Publication:

Feb. 2011

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