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Measurement of Dipoles/Roll-Off /Work Functions by Coupling CV and IPE and Study of Their Dependence on Fabrication Process

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13 Author(s)
Charbonnier, M. ; LETI/Minatec, CEA, Grenoble, France ; Leroux, C. ; Cosnier, V. ; Besson, P.
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We study the effective metal gate work function (WFMeff) of different metal/high-κ gate stacks. Both capacitance versus voltage measurement and internal photo emission measurement were used, leading to a better understanding of the WFMeff variations. We demonstrate that these variations are related to two main process dependent parameters, a voltage drop at the high- κ/SiO2 interface and the metal work function. These two parameters are studied for various process conditions.

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Electron Devices, IEEE Transactions on  (Volume:57 ,  Issue: 8 )