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In the design process of micro systems their heterogeneity is one major issue. This heterogeneity is caused by a close coupling of different physical effects as well as a strong influence of manufacturing technologies and operation conditions on the system behavior. System level simulation of micro systems features outstanding potentials for a comprehensive design support covering the whole range from specification phase to implementation. The basic prerequisite to take advantage of these potentials is the availability of models for all important components. However, currently there is a lack of methodological approaches for the systematic formulation of behavioral models. Therefore, a methodological modeling approach is proposed which aims at a systematic formulation of behavioral models for multi physics systems. It covers analysis and partitioning of the micro system, the description of physical effects, the mapping to a unified mathematical representation by equations, as well as approaches for model abstraction. The successful application of this modeling methodology will be described using some examples from industrial design tasks.