Cart (Loading....) | Create Account
Close category search window
 

Electrostatically tunable analog single crystal silicon fringing-field MEMS varactors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Small, Joshua ; Sch. of Electr. & Comput. Eng., Purdue Univ., West Lafayette, IN, USA ; Xiaoguang Liu ; Garg, A. ; Peroulis, D.

This paper reports on the design of a new analog MEMS varactor that uses electrostatic fringing-field actuation and is based on a single-crystal silicon movable structure coated with a thin metallic layer. Electrostatic fringing-field actuation allows for an analog displacement with no pull-in instability that yields a much larger tuning ratio compared to conventional electrostatic designs. In addition, total lack of dielectric layers and the use of single crystal silicon for the moving membrane significantly enhances the robustness of our proposed varactor by making it devoid of dielectric charging and stiction, insensitive to process variations, amenable to high yield manufacturing and less susceptible to hysteresis and creep. Based on this idea, we present example designs and the associated fabrication processes for varactors that exhibit a tuning ratio of 4.5:1 with capacitance values in the range of 43-200 fF achieved with DC voltages of 0-55 V. Such varactors are key elements in MEMS matching networks, tunable filters and reconfigurable antennas in the K/Ka/W-bands.

Published in:

Microwave Conference, 2009. APMC 2009. Asia Pacific

Date of Conference:

7-10 Dec. 2009

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.