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Graylevel alignment between two images using linear programming

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1 Author(s)
Lam, E.Y. ; Dept. of Electr. & Electron. Eng., Hong Kong Univ., China

A critical step in defect detection for semiconductor process is to align a test image against a reference. This includes both spatial alignment and grayscale alignment. For the latter, a direct least square approach is not very applicable because the presence of defects would skew the parameters. Instead, we use a linear programming formulation which has the advantage of having a fast algorithm, while at the same time can produce better alignment of the test image to the reference. Furthermore, this is a flexible algorithm capable of incorporating additional constraints, such as ensuring that the aligned pixel values are within the allowable intensity range.

Published in:

Image Processing, 2003. ICIP 2003. Proceedings. 2003 International Conference on  (Volume:2 )

Date of Conference:

14-17 Sept. 2003