MEMS microfilter with acoustic cleaning
Caton, P.F.
White, R.M.
Berkeley Sensor & Actuator Centre, California Univ., Berkeley, CA;
This paper appears in: Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Publication Date: 2001
On page(s): 479-482
Meeting Date: 01/21/2001 - 01/25/2001
Location: Interlaken, Switzerland
ISBN: 0-7803-5998-4
References Cited: 10
INSPEC Accession Number: 6912469
Digital Object Identifier: 10.1109/MEMSYS.2001.906583
Current Version Published: 2002-08-07
Abstract
This paper reports the design, fabrication, and testing of a new
MEMS microfilter developed from a flexural plate wave (FPW) device in
which acoustic forces generated within the filter membrane act to free
particles and sweep them away from clogged pores. MEMS devices have
already been shown to be effective for absolute filtration, but clogging
has made them impractical for most applications. Also previously shown
was the ability of flexural plate wave (FPW) devices to move particles
in a pumped liquid. Recognizing the FPW pumping as a self-cleaning
mechanism for microfilters presents exciting possibilities for reduced
filter fouling, allowing larger volumes of fluid to be filtered and
extending filter lifetime. Both the filtered fluid and the collected
large particles could be the useful output. Acoustic particle
manipulation has now been shown to free 2 and 10 μm diameter spheres
and sweep them away from once-blocked pores in both 4 μm and 8 μm
filters. Experiments were performed with deionized (DI) water and
polystyrene spheres
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