A low-voltage actuated micromachined microwave switch using torsionsprings and leverage
Dooyoung Hah
Songcheol Hong
Dept. of Electr. Eng. & Comput., Korea Adv. Inst. of Sci. & Technol., Taejon;
This paper appears in: Microwave Theory and Techniques, IEEE Transactions on
Publication Date: Dec 2000
Volume: 48,
Issue: 12
On page(s): 2540-2545
Meeting Date: 06/11/2000 - 06/16/2000
Location: Boston, MA, USA
ISSN: 0018-9480
References Cited: 10
CODEN: IETMAB
INSPEC Accession Number: 6842542
Digital Object Identifier: 10.1109/22.899010
Current Version Published: 2002-08-06
Abstract
In this paper, a push-pull type microwave switch is proposed,
which utilizes torsion springs and leverage for low-voltage operation.
The switching operation up to 4 GHz is demonstrated. The actuation
voltage is ~5 V. The insertion loss of ~1 dB and the isolation as high
as ~40 dB at 1 GHz are achieved by the push-pull operation
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