High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through
Burger, G.J.   Smulders, E.J.T.   Berenschot, J.W.   Lammerink, T.S.J.   Fluitman, J.H.J.   Imai, S.  
University of Twente;

This paper appears in: Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Publication Date: 25-29 Jun 1995
Volume: 1,  On page(s): 573-576
ISBN: 91-630-3473-5
Current Version Published: 2002-08-06