This paper appears in: Instrumentation and Measurement, IEEE Transactions on
Publication Date: Jun 1994
Volume: 43,
Issue: 3
On page(s): 469-474
ISSN: 0018-9456
References Cited: 16
CODEN: IEIMAO
INSPEC Accession Number: 4733202
Digital Object Identifier: 10.1109/19.293469
Current Version Published: 2002-08-06
Abstract
This paper describes a simple noncontact scanned probe microscope
for the static potential measurement of operating integrated circuits.
The instrument extracts the local potential on the integrated circuit by
nulling the electrostatic force between a small cantilever probe and the
circuit test point. The force is detected by monitoring the mechanical
deflection of the probe with an optical fiber interferometer. The
constructed instrument has demonstrated a millivolt accuracy with a
spatial resolution of less than 3 μm. Measurements can be made
directly in air on circuits both with and without a top insulating
passivation layer. The nulling technique allows absolute potential
measurements to be performed without complex calibration requirements
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