Tuning of MEMS devices using Evolutionary Computation and Open-Loop Frequency Response
Keymeulen, D.
Fink, W.
Ferguson, M.I.
Peay, C.
Oks, B.
Terrile, R.
Yee, K.
California Inst. of Technol., Pasadena, CA;
This paper appears in: Aerospace Conference, 2005 IEEE
Publication Date: 5-12 March 2005
On page(s): 1-8
Location: Big Sky, MT,
ISBN: 0-7803-8870-4
INSPEC Accession Number: 8977674
Digital Object Identifier: 10.1109/AERO.2005.1559562
Current Version Published: 2005-12-19
Abstract
We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation
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