An ink-jet-deposited passive component process for RFID
Redinger, D.
Molesa, S.
Shong Yin
Farschi, R.
Subramanian, V.
Electr. Eng. & Comput. Sci. Dept., Univ. of California, Berkeley, CA, USA;
This paper appears in: Electron Devices, IEEE Transactions on
Publication Date: Dec. 2004
Volume: 51,
Issue: 12
On page(s): 1978- 1983
ISSN: 0018-9383
INSPEC Accession Number: 8216861
Digital Object Identifier: 10.1109/TED.2004.838451
Current Version Published: 2004-11-30
Abstract
An all ink-jet-deposited process capable of creating high-quality passive devices suitable for an RFID front-end is described. Gold nanocrystals are printed to create conductive lines with sheet resistance as low as 23 mΩ per square. Optimal printing conditions are found for polyimide dielectric layers and films as thin as 340 nm are produced. These results are used to create spiral inductors, interconnect, and parallel plate capacitors.
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