Angular vertical comb-driven tunable capacitor with high-tuning capabilities
Nguyen, H.D.
Dooyoung Hah
Patterson, P.R.
Rumin Chao
Piyawattanametha, W.
Lau, E.K.
Wu, M.C.
Univ. of California, Los Angeles, CA, USA;
This paper appears in: Microelectromechanical Systems, Journal of
Publication Date: June 2004
Volume: 13,
Issue: 3
On page(s): 406- 413
ISSN: 1057-7157
INSPEC Accession Number: 8021872
Digital Object Identifier: 10.1109/JMEMS.2004.828741
Current Version Published: 2004-06-07
Abstract
This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators. The AVC tunable capacitor creates a large offset in comb fingers through a small rotation angle-an advantage not found in conventional lateral comb-drive devices. High capacitance and large continuous tuning ratio is achieved in a compact device area. The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF-a tuning ratio of more than 31:1, the highest ever reported. The maximum quality factor Q is 273 at 1 GHz near the minimum capacitance value.
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