MEMS for a watches
Noell, W.
Clerc, P.-A.
Jeanneret, S.
Hoogerwerf, A.
Niedermann, P.
Perret, A.
de Rooij, N.F.
Inst. of Microtechnol., Univ. of Neuchatel, Neuchatel, Switzerland;
Abstract
In order to make new mechanical watch movements possible as well as adding new functions to wristwatches, MEMS, UV-LIGA, and silicon micromachining have become indispensable technologies in the watch industries. Examples presented here are deep reactive ion etching (DRIE) of silicon gears, SU-8 based UV-LIGA and MEMS based pressure and magnetic sensors. This article provides a brief overview of some recent commercialized technologies in Switzerland.
Index
Terms
Available to subscribers and IEEE members.
References
Available to subscribers and IEEE members.
Citing Documents
Available to subscribers and IEEE members.
Cart
