Micromachined polarization beam splitters for the visible spectrum
Gupta, K.
Choo, H.
Kim, H.
Muller, R.S.
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA;
This paper appears in: Optical MEMS, 2003 IEEE/LEOS International Conference on
Publication Date: 18-21 Aug. 2003
On page(s): 171- 172
ISSN:
ISBN: 0-7803-7830-X
INSPEC Accession Number: 7978010
Digital Object Identifier: 10.1109/OMEMS.2003.1233520
Current Version Published: 2003-09-29
Abstract
Batch-processed polarization beam splitters (PBS) are built and characterized. PBS are important optical components used to separate the orthogonal TE and TM components of light. The devices are fabricated from thin-film, low-stress silicon nitride membranes and showed excellent performance. By stacking membranes and a triple-layer, PBS produce extinction ratios of 21 and 16 dB for reflected and transmitted light rays, respectively.
Index
Terms
Available to subscribers and IEEE members.
References
Available to subscribers and IEEE members.
Citing Documents
Available to subscribers and IEEE members.
Cart
