Electrostatic Comb Drive Levitation And Control Method
Tang, W.C.   Lim, M.G.   Howe, R.T.  
Ford Motor Company;

This paper appears in: Microelectromechanical Systems, Journal of
Publication Date: Dec 1992
Volume: 1,  Issue: 4
On page(s): 170-178
ISSN: 1057-7157
Digital Object Identifier: 10.1109/JMEMS.1992.752508
Current Version Published: 2002-08-06