Applications of Microelectromechanical Systems in Industrial Processes and Services
Dean, R.N.
Luque, A.
Auburn Univ., Auburn, AL;
This paper appears in: Industrial Electronics, IEEE Transactions on
Publication Date: April 2009
Volume: 56,
Issue: 4
On page(s): 913-925
ISSN: 0278-0046
INSPEC Accession Number: 10557976
Digital Object Identifier: 10.1109/TIE.2009.2013691
First Published: 2009-02-03
Current Version Published: 2009-03-31
Abstract
This paper presents a review of the current and future applications of microelectromechanical systems (MEMS) in the industrial sector. A historical perspective of the origin and development of MEMS is presented, as well as the traditional and innovative fabrication techniques. The process flow of computer-aided design and simulation is also discussed. After that, several of the most important applications of microsystems in the manufacturing and production sectors are enumerated and described. Two case examples are discussed in depth: gyroscopes for the measurement of angular movement, where the basic laws are provided, and a thorough review of existing devices is presented; and particle production devices for the generation of micrometer-sized droplets, where the two most common techniques are compared, along with the challenges that remain open. Finally, some conclusions and perspectives for the future are presented and discussed.
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